Dr. Chu-Ya (Jennifer) Yang
Assistant Manager at
SPIE Involvement:
Author
Area of Expertise:
Chemistry , Biomaterials , Microfluidics , Hydrogels , Tissue Engineering , Semiconductor
Publications (1)

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Oxides, Electron beam lithography, Point spread functions, Modulation, Backscatter, Scattering, Laser scattering, Image resolution, Critical dimension metrology, Standards development

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