Interrogating surface phonon polariton (SPhP) modes has mostly been pursued by measuring the far field behavior of resonant modes, through which SPhPs can be investigated by looking at resonant frequencies and linewidths along with the strength of the resonances. In other instances, the study of SPhPs has been accomplished by mapping electromagnetic fields solely at the surface of nanostructured resonators by atomic force microscopy assisted techniques and, in some limited cases, measuring the three-dimensional fields using electron scattering. Accurate knowledge of SPhPs has been hindered by the absence of experimental techniques to map eigenstates in three dimensions that are easy, cheap, and non-destructive.
Here, confocal Raman microscopy is used to obtain the spatial distribution of phonon modes in nanostructured polar materials. We demonstrated that SPhPs couple to bulk Raman modes through the material's polarizability and, to a lesser extent, via electron-phonon coupling. These observations provide a new method for measuring SPhP modes in nanostructured materials and a novel way to investigate the physical phenomena involved in coupling bulk phonons to SPhPs.
Resonant cavity infrared detectors (RCIDs) can reduce the noise in sensing a laser signal by strongly suppressing background photocurrent at wavelengths outside the narrow spectral band of interest. We recently reported an RCID with 100-nm-thick InAsSb/InAs absorber, GaAs/AlGaAs bottom mirror, and Ge/SiO2 top mirror. At T = 300 K, the external quantum efficiency reached 58% atλres ≈ 4.6 μm, with linewidth δλ = 27 nm. The characteristics at 125 K implied a specific detectivity of 5.5 × 1012 cm Hz½/W, which is more than 3× higher than for a state-of-the-art broadband HgCdTe device operating at that temperature. However, a prominent variation with mesa diameter of the deposited Ge spacer thickness made it difficult to predictably control λres for devices processed with a given diameter. This has been addressed by measuring the reflectivity spectrum following deposition of the spacer, so that thicknesses of the top mirror’s SiO2 and Ge layers could be adjusted appropriately to attain a targeted resonance. This was especially beneficial in matching the λres for a small mesa, needed to minimize the capacitance in high-frequency measurements, to the emission wavelength of a given ewquantum cascade laser.
For some applications, resonant cavity infrared detectors (RCIDs) offer advantages over traditional broadband photodetectors. The addition of a resonant cavity allows for higher external quantum efficiency (EQE), faster response time, and narrower spectral response for enhanced selectivity. Recently, the US Naval Research Laboratory demonstrated RCIDs with EQE of 34% and D∗ of 7 × 109 at room temperature, centered at 4.0 μm (46 nm FWHM). Princeton University has demonstrated that these RCIDs can detect gas-phase nitrous oxide (N2O) at room temperature with only a broadband light source and no other optical components. The results imply that a simple RCID-LED pair manufactured on a semiconductor wafer would provide a viable gas sensor. The manufacturing process could be completely automated, resulting in mass-producible optical gas sensors. Progress has been made for developing RCIDs at other wavelengths. Based on the achieved detection limit of 4% N2O at 4.0 μm, with 3 cm path length, leak detection of percentage-level concentrations of gases is definitely viable. The potential for operating at a more optimal wavelength to attain high-precision measurements at part-per-million (ppm) levels is still under investigation.
There is a general need to detect and measure the concentration of multiple hydrocarbon species in a gas. In this work, we have developed a tunable external cavity interband cascade laser (EC-ICL) that covers the wavelength range λ = 3216 to 3479 nm (Δ λ = 263 nm) in continuous wave (CW) mode. The EC-ICL provides a versatile broadband source for hydrocarbon detection and measurements. To demonstrate this capability, we incorporated the EC-ICL into an absorption spectroscopy sensor that includes a detector, data acquisition electronics, and software for data processing and spectral fitting. The AR/HR-coated laser with 3 mm cavity length is mounted epi-up on a heat spreader with a TEC. The external cavity is formed by a ruled diffraction grating in a Littman-Metcalf configuration to achieve broad tuning. The wavelength is tunable across the entire range with speed exceeding 15 Hz and effective system spectral resolution of approximately Δν = 0.7 cm-1 in a broad tuning mode. In addition, we developed and demonstrated mode-hop-free (MHF) tuning capability of the system for up to 0.4 cm-1 tuning range around an arbitrary user selected central wavelength with estimated spectral resolution significantly lower than Δν = 0.01 cm-1. Using the EC-ICL, we demonstrated direct absorption measurements of mixtures of methane, ethane, and propane inside an absorption cell. Furthermore, we demonstrated high resolution MHF measurements for methane in a low pressure fiber gas cell. The EC-ICL technology demonstrated in this work is appropriate for a variety of tunable laser applications spanning λ = 3 – 6 μm.
Frequency combs based on mid-infrared cascade lasers have been studied both experimentally and theoretically in recent years. So far only FM combs with quasi-cw output have been reported for interband cascade lasers (ICLs). We discuss the parameters that need to be achieved to realize passive mode locking in ICLs. The results are obtained from a comprehensive numerical model based on the wavevector-resolved Bloch equations coupled to the one-dimensional wave equation. We find that the design of the saturable absorber, in particular the carrier extraction time and length, is very important, while passive mode locking should already be achievable for the experimentally demonstrated values of group velocity dispersion. The leakage into the high-index GaSb substrate should also be controlled via the waveguide design.
Mid-IR emitters grown on silicon will be simpler to process and less expensive to manufacture than devices grown on GaSb. Here we report interband cascade light emitting devices grown on 4° offcut silicon. While core heating limited cw emission from epi-up devices on GaSb, dissipation via the substrate allowed devices on silicon to operate to much higher currents. Accounting for differences in architecture, the efficiency was approximately 75% of that for the best previous epi-down ICLEDs grown on GaSb. At 100 mA, 200-µm-diameter mesas produced 184 µW cw at T = 25 °C and 140 µW at 85 °C.
Mid-infrared, interband-cascade, light-emitting devices (ICLEDs) have the potential to improve the performance of trace-gas sensors for air quality and greenhouse gas measurements. ICLEDs are broadband, incoherent, high-optical-power devices (up to ~5 mW continuous-wave at room temperature). We present an ICLED-based, methane sensor using a hollow-core fiber and direct absorption spectroscopy. A 1σ noise equivalent absorption of 0.17 ppmv CH4 at 1 Hz was achieved (1.13e-5 absorbance). Sub-ppmv methane detection is relevant for monitoring emissions near sources such as petrochemical infrastructure, agricultural activities, and wastewater treatment plants.
Mid-infrared semiconductor lasers have emerged as indispensable compact coherent sources for military and commercial applications. While much of the historical emphasis has been on maximizing the output power and/or spectral purity, a recent new focus has been on engineering these lasers to operate as optical frequency combs (OFCs) for broadband real-time spectroscopy. In particular, the combination of low-drive-power and broad gain bandwidth has made interband cascade laser (ICL) OFCs an attractive complement to quantum cascade laser OFCs operating at longer wavelengths. Moreover, ICL combs can potentially be incorporated into fully-integrated dual-comb spectrometers that employ fast, room-temperature IC photodetectors processed on the same chip. However, the high refractive index of the ICL’s GaSb substrate poses some challenges to the optical waveguiding. Because the modal index is considerably lower than that of the substrate, the optical field can penetrate the bottom cladding layer and leak into the GaSb, inducing wavelength-dependent interference that modifies the gain and group velocity dispersion (GVD) profiles. Even when the effect on lasing threshold is small, the comb properties can be adversely affected. Using the sub-threshold Fourier transform technique, we studied ICL combs with various ridge widths, substrate thicknesses, and center wavelengths. This allowed us to evaluate the effects of modal leakage on the GVD. We find that the resonant nature of the substrate modes induces oscillations, which affect both the spectral bandwidth and the phase-locking properties above threshold. Strategies to mitigate the GVD’s undesired and unpredictable spectral variation will be presented.
By exploiting the bi-functional operation capability of interband cascade laser (ICL) frequency combs, we have utilized the laser medium not only for comb generation, but also as a room-temperature photodetector with near-GHz bandwidth for multi-heterodyne beating of the comb lines. Our self-contained platform consuming less than 2 W of electrical power enables free-running room-temperature broadband dual-comb spectroscopy of 1,1 difluoroethane with ~3% standard deviation in 2 ms over 600 GHz of optical bandwidth around 3.6 µm. We will discuss progress toward the optimization of ICL combs for realizing compact, low-power chemical sensors operating in the MWIR.
We report a preliminary investigation of ion bombardment (IB) effects on interband cascade laser (ICL) properties. Under some conditions, IB almost completely suppresses the vertical transport through a broad-area laser, although other times only a partial or negligible suppression is observed. To elucidate the mechanism that induces the suppression and in what part of the structure it occurs, we investigated the effects of IB on samples containing only ICL sub-regions. While IB increased the resistivity of a lightly-n-doped GaSb layer such as that used as a top or bottom separate confinement layer in an ICL, that layer was still much too conductive to strongly suppress the current flowing through a full device. The voltage drop was larger following IB of an InAs-AlSb superlattice such as that used in the top and bottom optical cladding layers in an ICL, although the effect was not large enough to fully account for the strong net suppression. And finally, the resistivity of an interband cascade LED containing the same active stages as an ICL was actually found to decrease following IB. Despite the inconclusive and sometime inconsistent findings of this study, it is nonetheless clear that if the effects can be controlled reproducibly, IB may provide a valuable tool for enhancing such ICL device configurations as weakly-index-guided narrow ridges and interband cascade vertical-cavity surface-emitting laser mesas that inject current and emit light only within a small central aperture.
For diffusion-limited nBn detectors, using an absorption layer much thinner than the optical attenuation length and minority carrier diffusion length can improve the dark current to provide greater sensitivity or higher temperature operation. However, if the quantum efficiency (QE) also decreases with absorber thickness, the advantage of reduced dark current is eliminated. We discuss the use of a metallic grating to couple the incident light into laterally propagating surface plasmon polariton (SPP) modes and increase the effective absorption length. We fabricate the gratings using a deposited Ge layer, which provides a uniform profile without increasing the dark current. Using this process in conjunction with a 0.5-μm-thick InAsSb absorber lattice-matched to GaSb, we demonstrate an external QE of 34% for T = 78 to 240 K. An nBn structure with an InAs0.8Sb0.2 absorber that is grown metamorphically on GaSb using a step-graded InGaSb buffer has a peak external QE of 39% at 100 K, which decreases to 32% by 240 K. Finally, we demonstrate that a grating with SPP resonance near the bandgap extends the absorption band and can potentially reduce the dark current by another factor of 3 to 8 times in addition to the 5 × reduction due to the thinner absorber.
Optical frequency combs have revolutionized the field of high resolution real-time molecular spectroscopy. Here, we demonstrate an electrically-driven optical frequency comb whose sub-picosecond pulses span more than 1 THz of spectral bandwidth centered near 3.3 mm. This is achieved by passively mode locking an interband cascade laser in a multi-contact architecture with gain and saturable absorber sections monolithically integrated on the same chip.
The high optical losses of metal-based plasmonic materials have driven an extensive search for alternative lower-loss materials that can support plasmonic-like effects, such as sub-diffraction confinement of optical fields. One such alternative employs phonon-mediated collective-charge oscillations (surface phonon polaritons, SPhPs) that can be optically excited in nanostructured polar dielectric materials. Similar to plasmonics, tailoring the geometry of polar-dielectric resonators results in resonances that can be spectrally tuned throughout the spectral range between the LO and TO phonons. However, generally, the spectral position and amplitude of these resonances remain fixed after sample fabrication. In this presentation, we discuss recent advancements made by our group in achieving actively tunable localized SPhP resonances in the long-wave- and far-infrared spectral regimes. In particular, we focus on three experiments that demonstrate active modulation of resonances. The first and second experiments focus on tuning the spectral position of localized SPhP resonances in cylindrical nanopillars that are etched into indium phosphide and silicon carbide substrates. In both of these cases we are able to induce resonance shifts as large as 15 cm-1 by optically injecting free-carriers into the pillars. The optical injection introduces a reversible, free-carrier perturbation to the dielectric permittivity that results in a spectral shift of the resonances. While the effects investigated for both the InP and SiC systems are similar, each material allows us to explore a different aspect of the phenomena. For InP we investigate the effects in the far-infrared (303-344 cm-1) with steady-state carrier photoinjection, while for SiC we investigate the dynamics of frequency modulated resonances in the long-wave infrared (797-972 cm-1) via transient reflection spectroscopy. Lastly, in the third experiment we demonstrate the ability to modulate the amplitude of resonances by coating SiC nanopillars with vanadium dioxide, a well-known phase change material that undergoes a metal-to-insulator transition near a temperature of 70 C. As such, we show that by exploiting this phase change we are able to modulate the reflectance and thermal emission of nanopillar arrays. The results described in this work may open the door to tunable, narrow-band thermal sources that operate in the long-wave to far-infrared spectral regimes.
We report resonant-cavity infrared detectors with absorbers that consist of only five quantum wells, but exhibiting 34% external quantum efficiency at room temperature at the resonant wavelength of 4.0 μm. The FWHM linewidth is 46 nm, and the peak absorption is enhanced by nearly a factor of 30 over that for a single pass through the absorber. Although the Shockley-Read lifetime in the current material is much shorter than the state of the art, the dark current density is at the level of HgCdTe detectors as quantified by “Rule 07”. The Johnson-noise limited detectivity (D*) at 21°C is 7 × 109 cm Hz½/W. We expect that future improvements in the device design and material quality will lead to higher quantum efficiency, as well as a significant reduction of the dark current density consistent with the very thin absorber.
We have experimentally investigated the effects of sidewall corrugations on the beam quality and brightness of narrow-ridge interband cascade lasers (ICLs) emitting at λ ≈ 3.3 μm. We find that at this wavelength a corrugation period of 10 µm provides greater suppression of higher-order lateral modes than a shorter period of 2-4 µm. While the power and efficiency decrease modestly for the longer corrugation period, there is a net increase of the brightness defined as the output power divided by the beam quality factor M2 . However, the brightness degrades when the corrugation amplitude is increased from 2 µm to 3.5 µm, since lower output power offsets a relatively small improvement of the beam quality
For diffusion limited nBn detectors, using an absorption layer much thinner than the optical attenuation length and minority carrier diffusion length can improve the dark current. As the absorber thickness decreases, the lower dark current increases the signal-to-noise ratio to provide greater sensitivity or higher temperature operation. However, if the quantum efficiency (QE) also decreases with absorber thickness, the advantage of reduced dark current is eliminated. Here we discuss the use of a metallic grating to couple the incident light into laterally-propagating surface plasmon polariton (SPP) modes, so as to increase the effective absorption length. We fabricate the gratings using a deposited Ge layer, which provides a uniform grating profile without increasing the dark current. Using this process in conjunction with a 0.5 μm-thick InAsSb absorber lattice-matched to GaSb, we demonstrate an external QE of 34% for T = 78–240 K. An nBn structure with an InAs0.8Sb0.2 absorber that is grown metamorphically on GaSb using a step-graded InGaSb buffer has a peak external QE of 39% at 100 K, which decreases to 32% by 240 K. Finally, we demonstrate that a grating with SPP resonance near the bandgap extends the absorption band, and can potentially reduce the dark current by a factor of 3–8 in addition to the 5× reduction due to the thinner absorber.
We are developing midwave infrared (mid-IR) quantum cascade lasers (QCLs) and interband cascade lasers (ICLs) bonded to silicon. The heterogeneous integration of mid-IR photonic devices with silicon promises to enable low-cost, compact sensing and detection capabilities that are compatible with existing silicon photonic and electronic technologies. The first Fabry-Perot QCLs on silicon were bonded to pre-patterned silicon-on-nitride-on-insulator (SONOI) substrates. Lateral tapers in the III-V mesas transferred the optical mode from the hybrid III-V/Si active region into the passive silicon waveguides, with feedback provided by reflections from both the III-V tapers and the polished passive silicon facets. Lasing was observed at 4.8 m with threshold current densities as low as 1.6 kA/cm2 when operated in pulsed mode at T = 20 ºC. The first mid-IR DFB lasers integrated on silicon employed gratings patterned into the silicon waveguides before bonding. Over 200 mW of pulsed power was generated at room temperature, and operated to 100 °C with T0 = 199 K. Threshold current densities were measured below 1 kA/cm2.The grating imposed considerable wavelength selectivity and 22 nm of thermal tuning, even though the emission was not spectrally pure. Ongoing research focuses on flip-chip bonding to improve heat sinking for continuous-wave operation, and arrayed waveguide gratings for beam combining. ICLs have also been bonded to silicon and the GaSb substrate has been chemically removed with an InAsSb etch-stop layer. Tapered ICL ridges designed for lasing in a hybrid III-V/Si mode have been processed above passive silicon waveguides patterned on SOI. A goal is to combine the power generated by arrays of QCLs and ICLs residing on the same chip into a single, high-quality output beam.
We report interband cascade light-emitting devices (ICLEDs) emitting at λ ≈ 3.1mm, which produce generate higher radiance, output power, and efficiency than any other mid-infrared LEDs operating in continuous wave (cw) mode near and above room temperature. This is achieved in part by splitting the 22 LED stages into four groups placed at the antinodes of the near-normal optical field when the device is mounted epitaxial-side-down on a reflective metal contact. At an applied bias of 9.4 V and injection current of 0.6 A, an ICLED with mesa diameter 400 mm produces 2.9 mW of cw output power at T = 25°C, which corresponds to a radiance of 0.73 W/cm2/sr. The wall-plug efficiency ranges from 0.4% at low powers to 0.05% at the maximum output power.
The effects of gamma radiation on Fabry–Perot interband cascade lasers (ICLs) were investigated. Two ICLs were exposed to cobalt-60 gamma rays for a total dose of 500 krad(Si) each. The ICLs do not show any evidence of changes in performance, including output power, threshold current, slope efficiency, or spectral frequency. These results demonstrate that ICLs are insensitive to gamma irradiation up to exposure rates above those normally encountered within a shielded spacecraft.
KEYWORDS: Spectroscopy, Signal to noise ratio, Quantum cascade lasers, Absorption, Methane, Spectral resolution, Optical engineering, Signal detection, Digital filtering, Sensors
While midinfrared radiation can be used to identify and quantify numerous chemical species, contemporary broadband midinfrared spectroscopic systems are often hindered by large footprints, moving parts, and high power consumption. In this work, we demonstrate multiheterodyne spectroscopy (MHS) using interband cascade lasers, which combines broadband spectral coverage with high spectral resolution and energy-efficient operation. The lasers generate up to 30 mW of continuous-wave optical power while consuming <0.5 W of electrical power. A computational phase and timing correction algorithm is used to obtain kHz linewidths of the multiheterodyne beat notes and up to 30 dB improvement in signal-to-noise ratio. The versatility of the multiheterodyne technique is demonstrated by performing both rapidly swept absorption and dispersion spectroscopic assessments of low-pressure ethylene (C2H4) acquired by extracting a single beat note from the multiheterodyne signal, as well as broadband MHS of methane (CH4) acquired with all available beat notes with microsecond temporal resolution and an instantaneous optical bandwidth of ∼240 GHz. The technology shows excellent potential for portable and high-resolution solid-state spectroscopic chemical sensors operating in the midinfrared.
We report interband cascade light-emitting devices (ICLEDs) emitting at peak wavelengths of 3.1 to 3.2 μm that display higher maximum output powers, radiances, and efficiencies than any earlier midwave-infrared LEDs when operated at 10 to 105°C. To enhance the output power, we split the ICLED’s 22 active stages into four groups positioned at antinodes of the optical field so that the emission interferes constructively when reflected at near-normal incidence from the metal contact of the epitaxial-side-down mounted device. At an applied bias of 9.6 V and injection current of 0.6 A, an ICLED with mesa diameter of 400 μm produces 3.1 mW of continuous-wave output power at T=10°C, which corresponds to a radiance of 0.79 W/cm2/sr. The same device generates 1.7 mW at T=105°C.
Interband cascade lasers (ICLs) are a promising light source for the mid-infrared (mid-IR) spectral range. However, for certain applications such as spectroscopic techniques for chemical sensing and non-invasive disease diagnostics, a broadband incoherent radiation source such as an LED may be more desirable. Here we investigate both ICLs and interband cascade light emitting devices (ICLEDs). The ICLEDs follow the example of ICLs by cascading multiple active stages in series to improve efficiency and increase output power, but without an optical cavity to provide feedback.
In this work we will present studies of these devices using high hydrostatic pressure techniques to determine the key efficiency limiting processes so that they might be mitigated. The application of hydrostatic pressure causes reversible changes to the band structure, increasing the energy of the conduction band gamma point and moving other key points in the band structure. This makes it a useful technique to probe recombination processes that depend on band gap and offsets, independently of temperature. For a laser dominated by CHCC Auger recombination, as is typical in narrow band gap devices for the mid-IR, one would expect a decrease in threshold current with increasing pressure, as the Auger process decreases with increasing band gap. However, the lasers studied here exhibit an increase in threshold current with pressure, indicating that other processes also play a significant role. We will discuss the relative contributions from Auger recombination and other processes such as defect-related recombination and carrier leakage in these devices, with respect to relevant modelling.
Silicon integration of mid-infrared (MIR) photonic devices promises to enable low-cost, compact sensing and detection capabilities that are compatible with existing silicon photonic and silicon electronic technologies. Heterogeneous integration by bonding III-V wafers to silicon waveguides has been employed previously to build integrated diode lasers for wavelengths from 1310 to 2010 nm. Recently, Fabry-Perot Quantum Cascade Lasers integrated on silicon provided a 4800 nm light source for MIR silicon photonic applications. Distributed feedback (DFB) lasers are appealing for many high-sensitivity chemical spectroscopic sensing applications that require a single frequency, narrow-linewidth MIR source. While heterogeneously integrated 1550 nm DFB lasers have been demonstrated by introducing a shallow surface grating on a silicon waveguide within the active region, no mid-infrared DFB laser on silicon had previously been reported. Here we demonstrate quantum cascade DFB lasers heterogeneously integrated with silicon-on-nitride-oninsulator (SONOI) waveguides. These lasers emit over 200 mW of pulsed power at room temperature and operate up to 100 °C. Although the output is not single mode, the DFB grating nonetheless imposes wavelength selectivity with 22 nm of thermal tuning.
Interband cascade lasers (ICLs) have proven to be efficient semiconductor sources of coherent mid -infrared (mid-IR) radiation. Single mode distributed-feedback (DFB) ICLs are excellent high-resolution spectroscopic sources for targeting important molecular species in the mid-IR fingerprint region, but are limited to a narrow spectral tuning range. Recent developments in multi-heterodyne spectroscopy with multi-mode Fabry-Perot (FP) lasers have enabled significant progress towards broadband high-resolution spectroscopic sensing applications in the mid-infrared. Here, we characterize the mode structure and tuning properties of multi-mode FP-ICLs for the purpose of evaluating the feasibility of ICL-based multiheterodyne spectroscopy.
While much of the previous work on interband cascade lasers (ICLs) has been limited to the 3-4 μm spectral range, it was recently demonstrated at NRL and elsewhere that the low threshold current and power densities characteristic of ICLs can be extended to longer wavelengths. Here we report on the performance of ICLs operating in the 4.6-6.1 μm spectral range. The pulsed threshold current density at room temperature for an ICL emitting at λ = 4.8 μm is 220 A/cm2, the lowest ever reported for a semiconductor laser at such a long emission wavelength. Broad-area devices emitting in the 4.6-4.9 μm range are observed to maintain pulsed external differential quantum efficiencies (EDQEs) of 11-17% when operating at 375 K. An ICL emitting at λ = 5.7 μm exhibits a threshold current density of 450 A/cm2 and EDQE of 27% at room temperature. The Auger coefficients extracted from these thresholds indicate a systematic increase with wavelength, with the value at 6 μm being 3-4 times higher than that at λ = 3.5 μm.
We report the single-mode operation of mid-infrared distributed-feedback (DFB) interband cascade lasers (ICLs) with contacts that cover only a fraction of the top surface of the laser ridge. This reduces the optical loss from the metal for the GaSb-relevant device configuration in which the grating is fabricated in the top layer of the DFB laser. Continuous wave (cw) room-temperature operation in a single spectral mode is observed for contact duty cycles as small as 14% when the width of the contact is fixed at 10 μm. The reduced contact duty cycle results in a factor of 2 decrease in the threshold current. The highest slope efficiency is observed for a contact duty cycle of 33%, for which the cw single-mode output power is as high as 6.8 mW.
We report cw wallplug efficiencies (WPEs) for mid-infrared interband cascade lasers (ICLs) that are comparable to those of state-of-the-art quantum cascade lasers at temperatures ranging from the cryogenic regime to room temperature. The continuous wave (cw) WPE for 10-stage broad-area devices remains above 40% for temperatures up to 125 K, and is still <30% at T = 175 K. At 80 K the threshold current density for a 2-mm-long cavity is only 11 A/cm2, and slope efficiencies are < 2.2 W/A at all temperatures ≤ 200 K. A 32-μm-wide × 3-mm-long ridge with 7 active stages and high-reflection and anti-reflection coatings on the two facets displays a cw WPE of 24% at T = 200 K and 12% at T = 300 K. The cw WPE of another narrow-ridge ICL was 18% at room temperature.
We report corrugated narrow-ridge interband cascade lasers emitting at λ ≈ 3.5 mm that have been fabricated using
CH4/Cl2- and BCl3-based inductively coupled plasma reactive ion etch processes, with largely similar results from
both types of etches. The highest brightness figure of merit was obtained at intermediate ridge width (28 mm), for
which the maximum cw output power at T = 25 °C was 522 mW and the corresponding wallplug efficiency and
beam quality factor were 10.3% and M2= 3.1, respectively. The high output power may be attributed to a 7-stage
design that employs thicker separate confinement layers for lower internal loss.
We report a narrow-ridge interband cascade laser emitting at λ ≈ 3.5 μm that produces up to 592 mW of cw power
with a wallplug efficiency of 10.1% and beam quality factor of M2 = 3.7 at T = 25 °C. Furthermore, devices from a
large number of wafers with similar 7-stage designs and wavelengths spanning 2.8-4.7 μm exhibit consistently
higher pulsed external differential quantum efficiencies than earlier state-of-the-art ICLs.
We discuss approaches to increasing the cw output power of the interband cascade lasers (ICLs) for the midwave
infrared spectral region. While most of the attention to date has been focused on reducing the operating power of the
ICL, the optimization for maximum output power proceeds in a different direction. We find that increasing the
number of stage is beneficial, in that it boosts the slope efficiency with only a modest penalty due to higher
threshold power density and extra heating. The critical figure of merit for realizing high-power ICLs is the internal
loss, which can be estimated from the external differential quantum efficiency (EDQE) per stage. The internal loss
can be controlled by varying the thickness of the low-doped GaSb separate-confinement layers (SCLs). We
demonstrate room-temperature EDQEs approaching 45% for broad-area 7-stage ICLs with 800-nm-thick SCLs.
We discuss two distinct approaches to realizing distributed-feedback (DFB) interband cascade lasers (ICLs) for
emission in the mid-IR. In the top-grating approach, the first-order gratings are produced by patterning high-index
germanium layers on top of narrow ridges with relatively thin top claddings. One 7-μm-wide device emitting at λ =
3.8 μm generated over 27 mW of cw single-mode output at 40°C, with a side-mode-suppression ratio <30 dB, while
at 80°C it still emitted <1 mW. At 20°C, a second device lased in a single spectral mode with <100 mW of drive
power. The tuning range was 21.5 nm with temperature and 10 nm with current. The corrugated-sidewall approach
relies on a fourth-order grating defined by optical lithography and etched into the sidewalls of the laser ridge. For a
13-μm-wide ICL ridge emitting at λ = 3.6 μm, the maximum power at T = 25°C was 55 mW, and at 40°C the device still produced 11 mW. We compare the physical requirements and performance characteristics for the two DFB
classes and conclude that top-grating DFBs generally exhibit greater stability and reproducibility, although the
efficiency is reduced by extra loss induced by modal overlap with the top metallization.
The performance of mid-IR interband cascade lasers (ICLs) has been improved by introducing heavier doping into
the electron injector regions with the purpose of increasing the electron density in the active region to the level
commensurate with the active hole density. For devices emitting at wavelengths in the 3.6-3.9 μm range, the
improvements include pulsed room temperature (RT) threshold current density as low as 170 A/cm2, maximum cw
operating temperature as high as 109 °C, and RT cw input power as low as 29 mW. Epi-down-mounted ridges
display RT cw wall-plug efficiencies as high as 14.6% as well as emission of > 200 mW into a nearly diffraction-limited
beam. RT cw operation has also been demonstrated for considerably longer wavelengths extending to 5.7
μm with threshold power densities of ≈1kW/cm2, which are an order of magnitude lower than those in state-of-theart
quantum cascade lasers. The very low operating powers are expected to lengthen battery lifetimes and greatly
relax packaging and size/weight requirements for fielded chemical-sensing systems.
Neuronal optical excitation can provide non-contacting tools to explore brain circuitry and a durable stimulation
interface for cardiac pacing and visual as well as auditory sensory neuronal stimulation. To obtain accurate absorption
spectra, we scan the transmission of neurons in cell culture medium, and normalize it by subtracting out the absorption
spectrum of the medium alone. The resulting spectra show that the main neuronal absorption peaks are in the 3000-
6000nm band, although there is a smaller peak near 1450nm. By coupling the output of a 3μm interband cascade laser
(ICL) into a mid-IR fluorozirconate fiber, we can effectively deliver more than 1J/cm2 photon intensity to the excitation
site for neuronal stimulation.
Our simulations find that the active quantum wells in previous mid-IR interband cascade laser (ICL) designs have
invariably contained far more holes than electrons. Further modeling shows that the carrier populations can be
rebalanced by heavily doping the electron injector regions to levels more than an order of magnitude higher than in
any earlier devices. The experimental implementation of this strategy has dramatically improved nearly all ICL
performance characteristics. For devices emitting at wavelengths in the 3.6-3.9 μm range, this includes pulsed room
temperature (RT) threshold current density as low as 170 A/cm2, maximum cw operating temperature as high as 109
°C, RT cw output power as high as 159 mW, RT cw wallplug efficiency as high as 13.5%, and RT cw input power
as low as 29 mW. We also demonstrate RT cw operation to wavelengths as long as 5.7 μm. The extremely low input
power to reach threshold, which is more than 25 times lower than the best ever reported for a quantum cascade laser,
will strongly impact battery lifetimes and other system requirements in fielded chemical sensing applications.
An interband cascade laser design has been grown by molecular beam epitaxy using uncracked arsenic and antimony
sources. Lasers were fabricated into both broad-area and narrow-ridge devices, with cavity lengths ranging between 1
mm and 4 mm. At 300K, under low-duty-cycle pulsed conditions, threshold current densities for lasers with 2-mm cavity
lengths are as low as 395 A/cm2, with optical emission centered at a wavelength of ~3.82 μm at 300 K. Continuous-wave
(cw) performance of the narrow-ridge devices has been achieved for temperatures up to almost 60°C. We present results
of both pulsed (broad-area and ridge) and cw (ridge only) measurements on these lasers, including L-I-V, spectral,
cavity-length, and Hakki-Paoli analyses.
The interband cascade laser (ICL) is a unique device concept that combines the effective parallel connection of its
multiple-quantum-well active regions, interband active transitions, and internal generation of electrons and holes at a
semimetallic interface within each stage of the device. The internal generation of carriers becomes effective under
bias, and the role of electrical injection is to replenish the carriers consumed by recombination processes. Major
strides have been made toward fundamentally understanding the rich and intricate ICL physics, which has in turn led
to dramatic improvements in the device performance. In this article, we review the physical principles of the ICL
operation and designs of the active region, electron and hole injectors, and optical waveguide. The results for state-of-
the-art ICLs spanning the 3-6 μm wavelength range are also briefly reviewed. The cw threshold input powers at
room temperature are more than an order of magnitude lower than those for quantum cascade lasers throughout the
mid-IR spectral range. This will lengthen battery lifetimes and greatly relax packaging and size/weight requirements
for fielded sensing systems.
We report an experimental study of how the light-current characteristics and lateral mode properties of interband cascade lasers depend on ridge width. Narrower ridges provide greater heat dissipation due to lateral flow, along with operation in a single lateral mode. However,sidewall imperfections increase the cw threshold current density somewhat, from Jth = 582 A/cm2 at 300 K for an 11-µm-wide ridge to 713 A/cm2 and 1.07 kA/cm2 for 5- and 3-µm-wide ridges, respectively. The narrowest ridges similarly display a degradation of the slope efficiency. A 13-µm- wide ridge produced 45 mW per facet of cw output power and maximum wall-plug efficiency of 3.5% per facet at T = 20°C. A 5-µm-wide ridge with 3-mm cavity length and no facet coatings operated cw at = 3.5-µm to a new record temperature of 345 K for the 3 to 4-µm spectral range.
We review the state-of-the-art performance of interband cascade lasers emitting in the 3-5 μm spectral band and
discuss the prospects for future improvements. New five-stage designs produce a combination of pulsed roomtemperature
threshold current densities of 400-500 A/cm2 and internal losses as low as ≈ 6 cm-1 for broad-area
devices. A 4.4-μm-wide ridge fabricated from one of these wafers and emitting at 3.7 μm lased cw to 335 K, which
is the highest cw operating temperature for any semiconductor laser in the 3.0-4.6 μm spectral range. A 10-μm-wide
ridge with high-reflection and anti-reflection facet coatings produced up to 59 mW of cw power at 298 K, and
displayed a maximum wall-plug efficiency of 3.4%. Corrugated-sidewall distributed-feedback lasers from similar
material produce 45 mW of cw power in a single spectral mode at -20°C, with maximum wall-plug efficiency of
7.6%. The current tuning range for temperatures between 0 and 25°C is ≥11 nm.
Lifetimes, Auger coefficients, and internal losses were deduced for 25 different type-II "W" interband cascade laser
structures, from correlations of the experimental threshold current densities and slope efficiencies with calculated
threshold carrier densities and optical gains. The room-temperature Auger coefficients for a number of lowthreshold
devices emitting at wavelengths from 2.9 μm to 5.2 μm fall in the narrow range 3-11 × 10-28 cm6/s, which
represents a much stronger suppression of Auger decay than was implied by most earlier experiments and theoretical
projections. The estimated internal loss is lowest at intermediate wavelengths, and the most recent designs display
additional reduction to as little as 8 cm-1 at 300 K.
Advances in the development of mid-IR antimonide type-II "W" interband cascade lasers (ICLs) have recently led
to the first demonstration of continuous wave operation at room temperature. The 5-stage narrow-ridge Auelectroplated
ICL emitted at λ= 3.75 μm produced over 10 mW of cw power at 300 K and operated to 319 K. The
considerable increase in Tmax was realized by carefully optimizing both the design and the MBE growth of these
complicated multilayer structures. The internal loss was decreased by reducing the doping in the claddings and
separate-confinement regions, and then using fewer stages to take advantage of the lower dissipated power density
while still having enough gain to reach threshold. We find that the improved properties are similarly available in
devices spanning the spectral window of at least 3.2-4.2 μm.
Electrically-pumped photonic-crystal distributed-feedback lasers with interband-cascade active regions operating in
single spectral mode at 3.3 μm are demonstrated. At 78 K, a stripe of width 400 μm emits up to 67 mW of cw power
into a single spectral mode with side-mode suppression ratio ≈ 27 dB. The full-width at half-maximum of the farfield
divergence angle is ≈ 0.5°, which combined with the near-field profile yields an effective M2 of 1.7-2.0.
Recent advances in the development of mid-IR antimonide type-II "W" interband cascade lasers have led to a
considerably improved high-temperature operation of the devices. We report an experimental investigation of four
interband cascade lasers with wavelengths spanning the mid-infrared spectral range, i.e., 2.9-5.2 μm near room
temperature in pulsed mode. One broad-area device had a pulsed threshold current density of only 3.8 A/cm at 78 K
(λ = 3.6 μm) and 590 A/cm2 at 300 K (λ = 4.1 μm). The room-temperature threshold for the shortest-wavelength
device (λ = 2.6-2.9 μm) was even lower, 450 A/cm2. A cavity-length study of the lasers emitting at 3.6-4.1 μm
yielded an internal loss varying from 7.8 cm-1 at 78 K to 24 cm-1 at 300 K, accompanied by a decrease of the internal
efficiency from 77% to 45%. Preliminary cw testing led to a narrow-ridge device from one of the wafers with
emission at λ = 4.1 μm operating to 288 K, a new record for interband devices in this wavelength range.
Measurement of the isotopic composition of atmospheric methane is a valuable tool for understanding the sources and sinks of the global carbon budget. One promising carbon isotope ratio measurement technology is optical spectroscopy using inter-band cascade (IC) lasers. Ongoing development of these light sources has the goal of providing, from a package operating near room temperature, a single mode laser source in the wavelength range of 3 &mgr;m. The spectral features of methane are sufficiently strong at this wavelength that a path length of about 100 m should suffice for measuring 12- and 13-C isotopes in air without pre-concentrating the sample. Experimental IC lasers are described and their use for isotope sensing by wavelength modulation spectroscopy is evaluated.
Significant recent advances in the high-temperature, high-power performance of type-II antimonide interband
cascade lasers (ICLs) operating in the mid-infrared are reported. A 5-stage ICL with a 12-&mgr;m ridge width and Au
electroplating for improved epitaxial-side-up heat sinking operates cw to a maximum temperature of 257 K, where
the emission wavelength is 3.7 &mgr;m. A similar device with a ridge width of 22 &mgr;m emits > 260 mW per facet for cw
operation at 80 K (λ = 3.4 &mgr;m) and 100 mW at 200 K (λ = 3.6 &mgr;m). Beam qualities for the narrowest ridges
approach the diffraction limit. A single-mode output power of 41 mW has been obtained at T = 120 K and λ ≈ 3.44
μm from a 13-&mgr;m-wide ICL patterned with a Ge distributed-feedback grating. The side mode suppression ratio at
the maximum power is 23 dB, and the linewidth of 0.1 nm is instrument-limited. An alternate contacting geometry
yielded robust single-mode output over a broad range of currents and temperatures, and current tuning of the
wavelength by up to 17 nm.
Significant recent advances in the high-temperature, high-power performance of type-II antimonide interband cascade lasers (ICLs) operating in the mid-infrared are reported. A 5-stage ICL with a 12μm ridge width and Au electroplating for improved epitaxial-side-up heat sinking operates cw to a maximum temperature of 257 K, where the emission wavelength is 3.7 μm. A similar device with a ridge width of 22 μm emits > 260 mW per facet for cw operation at 80 K (λ = 3.4 μm) and 100 mW at 200 K (λ = 3.6 μm). Beam qualities for the narrowest ridges approach the diffraction limit. The recent development of type-II "W" photodiodes for the long-wave infrared is also reviewed. A "W" photodiode with an 11.3 μm cutoff displayed a 34% external quantum efficiency (at 8.6 μm) operating at 80 K. A graded-gap design of the depletion region is shown to strongly suppress dark currents due to tunneling and generation-recombination processes. The median dynamic impedance-area product of 216 Ω-cm2 for 33 devices with 10.5 μm cutoff at 78 K is comparable to that for state-of-the-art HgCdTe-based photodiodes. The sidewall resistivity of ≈70 kΩ-cm for untreated mesas is also considerably higher than previous reports for passivated or unpassivated type-II LWIR photodiodes, apparently indicating self-passivation by the graded bandgap.
Whereas high-power operation (> 1 W of cw output power at 200 K) has been demonstrated for quantum cascade lasers emitting at λ = 4.7-6.2 μm, those devices generally exhibited multiple longitudinal modes. Recently, a distributed-feedback quantum cascade laser operating in a single spectral mode at λ = 4.8 μm and at temperatures up to 333 K has been reported. In the present work, we provide detailed measurements and modeling of its performance characteristics. The sidemode suppression ratio exceeds 25 dB, and the emission remains robustly single-mode at all currents and temperatures tested. Cw output powers of 99 mW at 298 K and 357 mW at 200 K are obtained at currents well below the thermal rollover point. The slope efficiency and subthreshold amplified spontaneous emission spectra are shown to be consistent with a coupling coefficient of no more than κL ≈ 4-5, which is substantially lower than the estimate of 9 based on the nominal grating fabrication parameters.
The I-V characteristics, lasing thresholds, and wallplug efficiencies of type-II "W" mid-IR diode lasers from 16 different wafers were studied in order to determine the influence of various device parameters. At T = 90 K, the wallplug efficiency for a 1-mm-long gain-guided device was > 10% and the slope efficiency was 142 mW/A (38% external quantum efficiency). When a 22-μm-wide ridge was lithographically defined on a 5-period "W" laser with a p-GaSb etch stop layer, the maximum cw operating temperature increased to 230 K. We also investigated 5-stage and 10-stage interband cascade lasers containing "W" active quantum wells. For 10-stage devices, the low-temperature threshold current densities were somewhat higher than in the "W" diodes while at higher temperatures they were slightly lower. The threshold voltage was only ≈ 0.1 V larger than the photon energy multiplied by the number of stages, corresponding to a voltage efficiency of > 96%, while the differential series resistance-area product above threshold was as low as 0.21 mΩ.cm2 at 100 K. At T = 78 K, the cw slope efficiency was 0.48 mW/A (126% external quantum efficiency), and a maximum cw power of 514 mW was produced by an epi-side-up-mounted 2-mm-long 10-stage laser cavity with uncoated facets. A 5-stage 2-mm-long interband cascade laser produced ≈ 700 mW of output power at 80 K, with a maximum wallplug efficiency of 20% per facet.
Mid-infrared “W” quantum-well diode lasers with reduced turn-on voltages are reported. Devices with coated facets operated in continuous-wave mode up to 195 K, where the emission wavelength was 3.56 microns. At 78 K the threshold current density was 67 A/cm2, the maximum output power was 198 mW, and the maximum slope efficiency was 106 mW/A. One of these lasers was used to detect methane, by exploiting the absorption band in the vicinity of 3.3 microns. Preliminary measurements demonstrated detection of methane at partial pressures down to 7 x 10-7 atm. in a nitrogen atmosphere.
Photonic-crystal distributed-feedback (PCDFB) lasers can potentially operate in a single optical mode that remains coherent over extremely large device areas, e.g., > 1 mm2, in spite of the effects of filamentation induced by the linewidth enhancement factor. Two-dimensional diffraction is induced by gratings that are defined on a rectangular lattice for edge emission, or on a hexagonal or square lattice for surface emission. Numerical simulations based on original algorithms reveal that whereas minimizing that product is almost always advantageous in edge-emitting lasers, an optimized surface-emitter should have an intermediate value. We also review recent experimental demonstrations of both 2nd-order and 1st-order optically pumped broad-stripe PCDFB lasers with “W” active regions that emit in the mid-IR.
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