Chun-Chen Yeh
at Taiwan Semiconductor Mfg Co
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Oxides, Image processing, Crystals, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Data acquisition, Failure analysis, Crystallography, Oxidation

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