Chun-Chieh Chen
Senior Photo Solution Engineer at KLA-Tencor Taiwan
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Semiconducting wafers, Luminescence, Air contamination, Scattering, Wafer-level optics, Process control, Metrology, Inspection, Metals, Signal attenuation

Proceedings Article | 11 May 2009 Paper
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Reticles, Semiconducting wafers, Inspection, Air contamination, Wafer inspection, Defect detection, Defect inspection, Dysprosium, Software development, Photomasks

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Inspection, Lithography, Modulation, Resolution enhancement technologies, Data analysis, Finite element methods, Defect inspection, Scanners

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Inspection, Photomasks, Optical proximity correction, Wafer inspection, Back end of line, Library classification systems, Semiconducting wafers, Copper, Defect inspection, Semiconductor manufacturing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top