Mr. Chun-Yen Chen Profile

Chun-Yen Chen

at National Taiwan Univ

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Publications (2)

Proceedings Article | 9 March 2013 Paper

Characteristics of a tapered hollow micro-tube emitting a Bessel light beam

Ming-Han Chung, Chun-Yen Chen, Chih-Kung Lee

Proceedings Volume 8612, 86120F (2013) https://doi.org/10.1117/12.2003498

KEYWORDS: Lithography, Polarization, Finite-difference time-domain method, Optical lithography, Bessel beams, Objectives, Super resolution, Charge-coupled devices, Microscopes, Waveguide modes

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Proceedings Article | 15 February 2012 Paper

Generating high DOF light by using tapered hollow tube in a lithography system

Chun-Yen Chen, Yu-Hsun Lee, Chih-Jen Chien, Yuh-Yan Yu, Chih-Kung Lee

Proceedings Volume 8249, 824912 (2012) https://doi.org/10.1117/12.906722

KEYWORDS: Bessel beams, Lithography, Near field scanning optical microscopy, Finite-difference time-domain method, Microscopes, Near field optics, Semiconductor lasers, Gold, Silicon, Silica

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