Dr. Chunguang Hu Profile

Dr. Chunguang Hu

at Johannes Kepler Univ Linz

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Author

Publications (3)

Proceedings Article | 26 November 2009 Paper

Impact of lamp instability on rotating compensator based ellipsometry

Chunguang Hu, Lidong Sun

Proceedings Volume 7506, 750617 (2009) https://doi.org/10.1117/12.837430

KEYWORDS: Lamps, Signal to noise ratio, Sensors, Interference (communication), Signal detection, Ellipsometry, Error analysis, Modulation, Data processing, Polarization

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Proceedings Article | 6 November 2006 Paper

Scanning white-light interferometry for microstructures geometrical characterization

Tong Guo, Chun-guang Hu, Jin-ping Chen, Xing Fu, Xiao-tang Hu

Proceedings Volume 6357, 63573O (2006) https://doi.org/10.1117/12.717253

KEYWORDS: Interferometry, Microelectromechanical systems, Microresonators, Standards development, Scanning electron microscopy, Nondestructive evaluation, Semiconducting wafers, Interferometers, Phase interferometry, Calibration

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Proceedings Article | 7 February 2006 Paper

Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis

Xiaodong Hu, Gang Liu, Tong Guo, Chunguang Hu, Xiaotang Hu

Proceedings Volume 6032, 60320N (2006) https://doi.org/10.1117/12.667872

KEYWORDS: Motion measurement, Interferometry, Phase shifts, Microelectromechanical systems, Phase shifting, Motion analysis, Interferometers, Fourier transforms, Bandpass filters, Linear filtering

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