Dr. Chunguang Suo
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Microelectromechanical systems, Gold, Silica, Etching, Electrons, Silicon, Platinum, Oxygen, Micromachining, Semiconducting wafers

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Microelectromechanical systems, Optical lithography, Electrodes, Silicon, Platinum, Semiconductor lasers, Wet etching, Picosecond phenomena, Microfabrication, Electroless plating

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