Mr. Chunseon Choi Profile

Chunseon Choi

at SK Hynix Inc

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Author

Publications (3)

Proceedings Article | 23 October 2015 Paper

Novel CD control of HTPSM by advanced process for sub-20nm tech

Sangjin Jo, Chungseon Choi, Sunghyun Oh, Taejoong Ha, Youngmo Lee, Sangpyo Kim, Donggyu Yim

Proceedings Volume 9635, 96351T (2015) https://doi.org/10.1117/12.2196938

KEYWORDS: Critical dimension metrology, Etching, Chromium, Scanning electron microscopy, Photomasks, Transmission electron microscopy, Double patterning technology, Phase shifts, Image processing, Signal processing

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Proceedings Article | 29 October 2014 Paper

A method of utilizing AIMS to quantify lithographic performance of high transmittance mask

Chun Seon Choi, Dong Sik Jang, Sung Hyun Oh, Jae Cheon Shin, Byungho Nam, Tae Joong Ha, Sang Pyo Kim, Dong Gyu Yim

Proceedings Volume 9235, 92351R (2014) https://doi.org/10.1117/12.2066283

KEYWORDS: Photomasks, Transmittance, Semiconducting wafers, Nanoimprint lithography, Lithography, Binary data, Chromium, Etching, Image analysis, Extreme ultraviolet

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Proceedings Article | 8 November 2012 Paper

Advanced photomask fabrication process to increase pattern reliability for sub-20nm node

Dong Shin, Sang Jo, Hee Jang, Yun Hong, Dae Hwang, Chung Choi, Dong Jang, Ho Jung, Tae Ha, Sang Kim, Dong Yim

Proceedings Volume 8522, 85220R (2012) https://doi.org/10.1117/12.964974

KEYWORDS: Etching, Chromium, Photomasks, Particles, Critical dimension metrology, Inspection, Reliability, Optics manufacturing, Manufacturing

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