Dr. Chunwei Chen
at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Contamination, Deep ultraviolet, Polymers, Diffusion, Chemistry, Inspection, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Copper, Silicon, Chemistry, Oxygen, Plating, Thin film coatings, Photoresist processing, Semiconducting wafers, Electroplating

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Gold, Lithography, Copper, Photoresist materials, Solids, Plating, Thin film coatings, Semiconducting wafers, Electroplating, Photoresist developing

Proceedings Article | 2 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Polymers, Molecules, Copper, Silicon, Diffusion, Coating, Fluorine, Semiconducting wafers, Polymer thin films, Chemically amplified resists

Proceedings Article | 23 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Silica, Nanoparticles, Etching, Particles, Resistance, Photoresist materials, Deep reactive ion etching, Plasma etching, Nanocomposites, Plasma

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Polymers, Copper, Silicon, Chemistry, Optical coatings, Plating, Photoresist processing, Semiconducting wafers, Electroplating, Temperature metrology

Showing 5 of 6 publications
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