Clark Vandam
at Synopsys Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 March 2021 Presentation + Paper
Proceedings Volume 11613, 116130P (2021) https://doi.org/10.1117/12.2587107
KEYWORDS: Machine learning, Visualization, Optical proximity correction, Neural networks

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11327, 1132706 (2020) https://doi.org/10.1117/12.2551425
KEYWORDS: Data modeling, Photomasks, Lithography, Machine learning, Optical proximity correction, Convolution, Network architectures, Inverse problems, Calibration

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