Clark Vandam
at Synopsys Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 March 2021 Presentation + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Visualization, Neural networks, Machine learning, Optical proximity correction

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Lithography, Data modeling, Calibration, Inverse problems, Photomasks, Machine learning, Optical proximity correction, Convolution, Network architectures

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