Dr. Claude Montcalm
Director of Operations at Iridian Spectral Technologies Ltd
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 25 September 2008
Proc. SPIE. 7101, Advances in Optical Thin Films III
KEYWORDS: Thin films, Optical filters, Fabry–Perot interferometers, Luminescence, Silicon, Manufacturing, Raman spectroscopy, Transmittance, Electronic filtering, Optics manufacturing

Proceedings Article | 20 August 2001
Proc. SPIE. 4343, Emerging Lithographic Technologies V
KEYWORDS: Mirrors, Multilayers, Reticles, Sensors, Xenon, Projection systems, Extreme ultraviolet, Optical alignment, Semiconducting wafers, Fiber optic illuminators

Proceedings Article | 20 August 2001
Proc. SPIE. 4343, Emerging Lithographic Technologies V
KEYWORDS: Mirrors, Multilayers, Imaging systems, Scattering, Cameras, Light scattering, Optical coatings, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography

SPIE Journal Paper | 1 March 2001
OE Vol. 40 Issue 03
KEYWORDS: Reflectivity, Multilayers, Annealing, Extreme ultraviolet, Semiconducting wafers, Mirrors, Silicon, Extreme ultraviolet lithography, EUV optics, Optical engineering

Proceedings Article | 22 January 2001
Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Multilayers, Optical lithography, Defect detection, Coating, Inspection, Ion beams, Photomasks, Extreme ultraviolet lithography, Process modeling

Proceedings Article | 21 July 2000
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Mirrors, Optical design, Reticles, Distortion, Projection systems, Extreme ultraviolet, Optical alignment, Semiconducting wafers, Tolerancing, Fiber optic illuminators

Showing 5 of 17 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top