Dr. Claudia C. Delgado Simão
Senior Scientist at EURECAT-Ctr Tecnològoc Catalunya
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Dimensional metrology, Directed self assembly, Optical alignment, Imaging arrays

PROCEEDINGS ARTICLE | June 25, 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Thin films, Nanostructures, Scattering, Annealing, Silicon, Scanning electron microscopy, Silicon films, Directed self assembly, Picosecond phenomena, Nanoimprint lithography

PROCEEDINGS ARTICLE | May 28, 2014
Proc. SPIE. 9110, Dimensional Optical Metrology and Inspection for Practical Applications III
KEYWORDS: Lithography, Statistical analysis, Annealing, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Directed self assembly, Picosecond phenomena, Optical alignment

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Statistical analysis, Polymers, Annealing, Silicon, Image analysis, Scanning electron microscopy, Software development, Directed self assembly, Picosecond phenomena, Optical alignment

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