Claus Maier
at Univ Ulm
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 October 2001
Proc. SPIE. 4400, Microsystems Engineering: Metrology and Inspection
KEYWORDS: Microelectromechanical systems, Microscopes, Light sources, Microfluidics, Visualization, Imaging systems, Cameras, Image processing, CCD cameras, 3D image processing

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