Dr. Clifford L. Henderson
at Georgia Institute of Technology
SPIE Involvement:
Fellow status | Conference Program Committee | Conference Chair | Conference Co-Chair | Author
Publications (120)

PROCEEDINGS ARTICLE | April 4, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Polymers, Interfaces, Computer simulations, Solids, Line width roughness, Directed self assembly, Line edge roughness, Device simulation, Molecular self-assembly

SPIE Journal Paper | November 22, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Interfaces, Thin films, Polymers, Bridges, Optical lithography, Polymerization, Device simulation, Skin, Algorithms, Directed self assembly

SPIE Journal Paper | October 27, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Line edge roughness, Line width roughness, Optical lithography, Double patterning technology, Interfaces, Directed self assembly, Polymers, Polymerization, Etching, Chemical species

SPIE Journal Paper | October 20, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Directed self assembly, Thermodynamics, Polymers, Annealing, Nanoimprint lithography, Extreme ultraviolet lithography, Device simulation, Optical lithography, Semiconductors, Lithography

PROCEEDINGS ARTICLE | April 19, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Thin films, Optical lithography, Polymers, Annealing, Computer simulations, Feature extraction, Directed self assembly, Thermodynamics, Device simulation, Molecular self-assembly

SPIE Journal Paper | May 10, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Directed self assembly, Thermodynamics, Polymers, Interfaces, Computer simulations, Polymerization, Systems modeling, Binary data, Thin films, Semiconductors

Showing 5 of 120 publications
Conference Committee Involvement (17)
Advances in Patterning Materials and Processes XXXVI
24 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIII
29 February 2016 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXII
24 February 2015 | San Jose, California, United States
Showing 5 of 17 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top