Prof. Clifford L. Henderson
at Georgia Institute of Technology
SPIE Involvement:
Conference Program Committee | Author
Publications (119)

Proceedings Article | 23 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Thin films, Molecular bridges, Polymers, Annealing, Computer simulations, Bridges, Directed self assembly

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Thin films, Optical lithography, Modulation, Etching, Polymers, Computer simulations, Line width roughness, Directed self assembly, Line edge roughness, Molecular self-assembly

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Thin films, Optical lithography, Polymers, Annealing, Interfaces, Diffusion, Resistance, Line width roughness, Directed self assembly, Line edge roughness

Proceedings Article | 4 April 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Polymers, Interfaces, Computer simulations, Solids, Line width roughness, Directed self assembly, Line edge roughness, Device simulation, Molecular self-assembly

SPIE Journal Paper | 22 November 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Interfaces, Thin films, Polymers, Bridges, Optical lithography, Polymerization, Device simulation, Skin, Algorithms, Directed self assembly

Showing 5 of 119 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 30 March 2009

SPIE Conference Volume | 24 April 2008

SPIE Conference Volume | 15 March 2007

SPIE Conference Volume | 9 March 2006

Conference Committee Involvement (19)
Advances in Patterning Materials and Processes XXXVIII
21 February 2021 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Showing 5 of 19 Conference Committees
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