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Dr. Clive H. Burton
at Clive Burton LLC
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Publications (1)
Proceedings Article | 19 August 2005 Paper
Improved AR coating reflection color uniformity and stability using multiple anodes and fuzzy logic control in DC reactive sputter coating
Proceedings Volume 5870, 587008 (2005) https://doi.org/10.1117/12.618976
KEYWORDS: Fuzzy logic, Lenses, Reflectivity, Control systems, Antireflective coatings, Coating, Oxygen, Plasma, Silica, Zirconium dioxide
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