Prof. Clivia M. Sotomayor Torres
ICREA Research Professor at Institut Català de Nanociència i Nanotecnologia
SPIE Involvement:
Conference Program Committee | Conference Chair | Author
Publications (34)

PROCEEDINGS ARTICLE | September 24, 2015
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Nanostructures, Electron beam lithography, Diffraction, Optical design, Metrology, Polymers, Scanning electron microscopy, Critical dimension metrology, Polymer thin films, Diffraction gratings

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Dimensional metrology, Directed self assembly, Optical alignment, Imaging arrays

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Diffraction, Polymethylmethacrylate, Scattering, Polymers, Silicon, Control systems, Platinum, Scanning electron microscopy, Nanofabrication, Diffraction gratings

PROCEEDINGS ARTICLE | June 25, 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Thin films, Nanostructures, Scattering, Annealing, Silicon, Scanning electron microscopy, Silicon films, Directed self assembly, Picosecond phenomena, Nanoimprint lithography

PROCEEDINGS ARTICLE | May 28, 2014
Proc. SPIE. 9110, Dimensional Optical Metrology and Inspection for Practical Applications III
KEYWORDS: Lithography, Statistical analysis, Annealing, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Directed self assembly, Picosecond phenomena, Optical alignment

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Statistical analysis, Polymers, Annealing, Silicon, Image analysis, Scanning electron microscopy, Software development, Directed self assembly, Picosecond phenomena, Optical alignment

Showing 5 of 34 publications
Conference Committee Involvement (3)
Micro-Optics
14 April 2014 | Brussels, Belgium
Micro-Optics
16 April 2012 | Brussels, Belgium
Photonic Crystal Materials and Nanostructures
27 April 2004 | Strasbourg, France
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