Clyde H. Browning
Mask Design Manager at ASELTA Nanographics
SPIE Involvement:
Publications (12)

Proceedings Article | 29 August 2019 Paper
Varvara Brackmann, Michael Friedrich, Clyde Browning, Norbert Hanisch, Benjamin Uhlig
Proceedings Volume 11177, 1117713 (2019)
KEYWORDS: Point spread functions, Scattering, Scanning electron microscopy, Tolerancing, Critical dimension metrology, Calibration, Electron beam lithography, Electron beams

Proceedings Article | 19 September 2018 Paper
Clyde Browning, Serguei Postnikov, Matthieu Milléquant, Sébastien Bayle, Patrick Schiavone
Proceedings Volume 10775, 107750K (2018)
KEYWORDS: Tolerancing, Data processing, Lithography, Manufacturing, Photomasks, Data modeling, Optical proximity correction, Photoresist processing, Silicon

Proceedings Article | 22 March 2016 Paper
Aurélien Fay, Clyde Browning, Pieter Brandt, Jacky Chartoire, Sébastien Bérard-Bergery, Jérôme Hazart, Alexandre Chagoya, Sergei Postnikov, Mohamed Saib, Ludovic Lattard, Patrick Schavione
Proceedings Volume 9777, 977714 (2016)
KEYWORDS: Electron beam lithography, Lithography, Optical lithography, Photoresist processing, Software development, Semiconducting wafers, Optical simulations, Electronic design automation, Data modeling, Metrology, Point spread functions, Electroluminescence, Logic, Critical dimension metrology, Calibration, Manufacturing

Proceedings Article | 23 October 2015 Paper
Proceedings Volume 9635, 963515 (2015)
KEYWORDS: Point spread functions, Critical dimension metrology, Algorithm development, Scattering, Calibration, Cadmium sulfide, Computer simulations, Semiconducting wafers, Photovoltaics, Electron beams

Proceedings Article | 29 October 2014 Paper
Clyde Browning, Thomas Quaglio, Thiago Figueiro, Sébastien Pauliac, Jérôme Belledent, Aurélien Fay, Jessy Bustos, Jean-Christophe Marusic, Patrick Schiavone
Proceedings Volume 9235, 92350V (2014)
KEYWORDS: Tolerancing, Lithography, Manufacturing, Vestigial sideband modulation, Photomasks, Data processing, Photoresist processing, Electron beam lithography, Printing, Photonic crystals

Showing 5 of 12 publications
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