Coby Zelnik
at Sage Design Automation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 March 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Lithography, Statistical analysis, Manufacturing, Double patterning technology, Statistical modeling, Astatine, Standards development, 193nm lithography, Design for manufacturability

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Error analysis, Silicon, Manufacturing, Design for manufacturing, Optimization (mathematics), Optics manufacturing, Electronic design automation, Model-based design, Design for manufacturability

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Silicon, Manufacturing, Computer simulations, Design for manufacturing, Photomasks, Optical proximity correction, Process modeling, Device simulation, Design for manufacturability

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