Cody M. Berger
Graduate Student at Georgia Inst of Technology
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Data modeling, Sensors, Electrodes, Polymers, Molecules, Dielectrics, Photoresist materials, Capacitance, Chemical analysis, Polymer thin films

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, FT-IR spectroscopy, Optical lithography, Polymers, Ultraviolet radiation, Molecules, Hydrogen, Photoresist materials, Solids, Photoresist developing

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Sensors, Electrodes, Polymers, Ions, Diffusion, Resistance, Photoresist materials, Humidity, Dielectric spectroscopy, Polymer thin films

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Data modeling, Sensors, Electrodes, Polymers, Dielectrics, Silicon, Coating, Photoresist materials, Capacitance, Polymer thin films

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Thin films, Quartz, Electrodes, Polymers, Crystals, Dielectrics, Diffusion, Photoresist materials, Capacitance, Humidity

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Data modeling, Sensors, Electrodes, Polymers, Dielectrics, Coating, Photoresist materials, Capacitance, Absorbance, Chemically amplified resists

Showing 5 of 6 publications
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