Dr. Chiu Wing Hui
SPIE Involvement:
Publications (9)

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10148, 1014814 (2017) https://doi.org/10.1117/12.2258203
KEYWORDS: Transistors, Metals, Databases, Resistors, Lithium, Digital electronics, Error analysis, Capacitors, Analog electronics, Manufacturing, System on a chip, Semiconductors, Silicon, New and emerging technologies

Proceedings Article | 28 March 2017 Presentation + Paper
Ushasree Katakamsetty, Jiansheng Jansen Chee, Yongfu Li, Chiu Wing Hui, Yaodong Huang, Ernesto Gene de la Garza
Proceedings Volume 10148, 101480Q (2017) https://doi.org/10.1117/12.2262076
KEYWORDS: Chemical mechanical planarization, Front end of line, Metrology, Back end of line, Calibration, Silicon, Data modeling, Metals, Manufacturing, Oxides

Proceedings Article | 16 March 2016 Paper
Ushasree Katakamsetty, Jansen Chee, Yongfu Li, Colin Hui, Jaime Bravo, Tamba Gbondo-Tugbawa, Brian Lee, Kuang-Han Chen, Aaron Gower-Hall, Sang-Min Han
Proceedings Volume 9781, 97810K (2016) https://doi.org/10.1117/12.2219545
KEYWORDS: Chemical mechanical planarization, Manufacturing, Design for manufacturability, Semiconducting wafers, Silicon, Etching, Product engineering, Design for manufacturing, Data modeling, Calibration, Copper, Back end of line, Metals

Proceedings Article | 18 March 2015 Paper
Proceedings Volume 9427, 94270V (2015) https://doi.org/10.1117/12.2085733
KEYWORDS: Design for manufacturing, Chemical mechanical planarization, Silicon, Manufacturing, Failure analysis, Design for manufacturability, Metals, Chemical analysis, Lithography, Nanoimprint lithography

Proceedings Article | 18 March 2015 Paper
Ushasree Katakamsetty, Dinesh Koli, Sky Yeo, Colin Hui, Ruben Ghulghazaryan, Burak Aytuna, Jeff Wilson
Proceedings Volume 9427, 94270U (2015) https://doi.org/10.1117/12.2085728
KEYWORDS: Chemical mechanical planarization, Data modeling, Metrology, Semiconducting wafers, Calibration, Manufacturing, Visualization, Metals, Polishing, Surface finishing

Showing 5 of 9 publications
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