Dr. Chiu Wing Hui
at GLOBALFOUNDRIES Singapore
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithium, Capacitors, Databases, Metals, Error analysis, Silicon, Manufacturing, Transistors, Resistors, Analog electronics, Digital electronics, System on a chip, New and emerging technologies

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Oxides, Metrology, Data modeling, Calibration, Metals, Silicon, Manufacturing, Chemical mechanical planarization, Back end of line, Front end of line

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Data modeling, Calibration, Etching, Metals, Copper, Silicon, Manufacturing, Design for manufacturing, Semiconducting wafers, Product engineering, Chemical mechanical planarization, Back end of line, Design for manufacturability

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Metals, Silicon, Manufacturing, Design for manufacturing, Chemical analysis, Nanoimprint lithography, Failure analysis, Chemical mechanical planarization, Design for manufacturability

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Polishing, Metrology, Data modeling, Visualization, Calibration, Metals, Manufacturing, Semiconducting wafers, Surface finishing, Chemical mechanical planarization

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9053, Design-Process-Technology Co-optimization for Manufacturability VIII
KEYWORDS: Lithography, Scanners, Copper, Manufacturing, Finite element methods, Design for manufacturing, Semiconducting wafers, Surface finishing, Chemical mechanical planarization, Design for manufacturability

Showing 5 of 9 publications
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