Mr. Colin C. Welch Profile

Colin C. Welch

at Oxford Instruments Plasma Technology Ltd

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Publications (2)

Proceedings Article | 10 January 2013 Paper

Formation of nanoscale structures by inductively coupled plasma etching

Colin Welch, Deirdre Olynick, Zuwei Liu, Anders Holmberg, Christophe Peroz, Alex P. Robinson, M. David Henry, Axel Scherer, Thomas Mollenhauer, Vince Genova, Doris K. Ng

Proceedings Volume 8700, 870002 (2013) https://doi.org/10.1117/12.2017609

KEYWORDS: Etching, Silicon, Photomasks, Ions, Plasma, Cryogenics, Polymers, Nanoimprint lithography, Silica, Chromium

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Proceedings Article | 20 February 2007 Paper

Inductively coupled plasma etching of ZnO

Karen Nordheden, Mark Dineen, Colin Welch

Proceedings Volume 6474, 64740P (2007) https://doi.org/10.1117/12.714048

KEYWORDS: Etching, Zinc oxide, Plasma, Plasma etching, Scanning electron microscopy, Plasma systems, Gases, Ions, Silicon, Photoresist materials

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