Machine tools play an important role in the manufacturing industry. The straightness error of the guide rail during machining seriously affects the accuracy of the machine tool, which is usually measured based on the laser collimation principle by the quadrant detector (QD). Laser beam radius varies significantly with long propagation distances. However, the traditional measurement model hardly considers the impact of radius variation. Therefore, an improved straightness measurement model is proposed. The spot radius variation is taken into account in the improved model. Meanwhile, an accurate trajectory equation for the variation of beam radius with distance was quickly established using less measured data. It facilitates faster and more accurate straightness measurements in industrial sites. The feasibility of the improved model is verified at four distances during 5 m. At 3.5 m, the maximum calibration error of the improved model was −1.65 μm, which is 86.8% lower than the traditional model. Meanwhile, the root mean square error of the improved model was 0.7 μm, which was 83.1% lower than the traditional model. The maximum repeatability error of the straightness was 0.28 μm. The straightness measurement accuracy of the improved model is obviously improved at long distances. The improved model would have great potential for long-distance measurement using lasers based on QD.
Multi-degree-of-freedom measurement (MDFM) system is an effective way to measure multiple degrees of freedom errors simultaneously. In the MDFM system, the pitch angle and yaw angle are often measured based on the autocollimation measurement principle. Due to the lens fabrication and installation errors, the angle detector will deviate from the focal plane, causing defocus error. To address the problem, a defocus error model is established to analyze the influencing factors and solve the position of the focal plane. It is found that the straightness is the main factor of defocus error. When the defocus amount is present, the defocus error is larger with the increase of straightness. And the sensitivity of angle detector has a specific relationship with the intensity density of spot, which is related to the defocus amount. By using a precision displacement table, the position of the focal plane and the corresponding angle detector output can be accurately obtained. The experiment was carried out to verify the feasibility of this method. The angle detector and lens were installed precisely according to the angle detector output. When the vertical straightness is within ±400 μm, the influence of the defocus error on the pitch angle is less than 2 μrad. The results showed that the method can reduce the defocus error of auto-collimation measurement effectively, which can improve the accuracy of angle measurement in MDFM system.
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