Dr. Congpeng Zhang
at North China Univ of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 31, 2008
Proc. SPIE. 7130, Fourth International Symposium on Precision Mechanical Measurements
KEYWORDS: Lithography, Nerve, Interferometers, Error analysis, Neural networks, Manufacturing equipment, Motion models, Motion measurement, Process modeling, Temperature metrology

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