Corinne L. Carpenter
at Univ of California Santa Barbara
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Optical lithography, Oscillators, Statistical analysis, Roentgenium, Error analysis, Crystals, Control systems, Thermal effects, Directed self assembly, Systems modeling

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Roentgenium, Etching, Polymers, Materials processing, Adaptive optics, Control systems, Directed self assembly, Semiconducting wafers, 3D image processing

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Roentgenium, Polymers, Interfaces, Directed self assembly, Charge-coupled devices, Picosecond phenomena, Systems modeling

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