Dr. Cornel Bozdog
at Onto Innovation
SPIE Involvement:
Conference Program Committee | Author
Area of Expertise:
Metrology , Scatterometry , Spectroscopy , Optical profiling , Modeling , Algorithms
Websites:
Publications (28)

Proceedings Article | 16 September 2022 Paper
M. Mucientes, A. Khachaturiants, R. Trussell, A. Kalinin, Y. Guo, E. Simons, S. Kim, O. Nadyarnykh, A. Moussa, J. Bogdanowicz, J. Severi, G. Lorusso, D. De Simone, A.-L. Charley, P. Leray, M. van Reijzen, C. Bozdog, H. Sadeghian
Proceedings Volume 12325, 123250M (2022) https://doi.org/10.1117/12.2641698
KEYWORDS: Scanning probe microscopy, Semiconducting wafers, Metrology, Optical lithography, Bridges, Extreme ultraviolet lithography, Defect inspection, Photoresist materials, Inspection, Atomic force microscopy

Proceedings Article | 13 June 2022 Presentation
Artem Khatchaturiants, Marta Mucientes, Arseniy Kalinin, Yan Guo, Seokhan Kim, Alain Moussa, Janusz Bogdanowicz, Joren Severi, Gian Lorusso, Danilo De Simone, Anne-Laure Charley, Philippe Leray, Maarten van Reijzen, Cornel Bozdog, Hamed Sadeghian
Proceedings Volume PC12053, PC120530I (2022) https://doi.org/10.1117/12.2616089
KEYWORDS: Scanning probe microscopy, Metrology, Photoresist materials, Extreme ultraviolet lithography, Scanning probe metrology, Profiling, Process control, Extreme ultraviolet, Atomic force microscopy, Stochastic processes

Proceedings Article | 26 May 2022 Presentation + Paper
I. Battisti, K. Makles, M. S. Mucientes, Y. Guo, E. Simons, J. Bogdanowicz, A. Moussa, V. Blanco, F. Yasin, D. Crotti, A.-L. Charley, P. Leray, M. van Reijzen, C. Bozdog, H. Sadeghian
Proceedings Volume 12053, 1205310 (2022) https://doi.org/10.1117/12.2616093
KEYWORDS: Overlay metrology, Semiconducting wafers, Opacity, Atomic force microscopy, Scanning probe metrology, Image resolution, Pixel resolution, Photomasks

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 1161126 (2021) https://doi.org/10.1117/12.2584759
KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Semiconducting wafers

Proceedings Article | 22 February 2021 Presentation + Paper
M. van Reijzen, M. Boerema, A. Kalinin, H. Sadeghian, C. Bozdog
Proceedings Volume 11611, 116112E (2021) https://doi.org/10.1117/12.2595426

Showing 5 of 28 publications
Conference Committee Involvement (4)
Metrology, Inspection, and Process Control XXXVIII
26 February 2024 | San Jose, California, United States
Metrology, Inspection, and Process Control XXXVII
27 February 2023 | San Jose, California, United States
Metrology, Inspection, and Process Control XXXVI
25 April 2022 | San Jose, California, United States
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
22 February 2021 | Online Only, California, United States
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