Courtney A. Brewer
Process Development Engineer at Broadcom Inc
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | September 29, 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: Microscopes, Modulation, Microscopy, Objectives, Photomasks, Extreme ultraviolet lithography, Modulation transfer functions, Spatial resolution, X-ray lasers, Zone plates

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Microscopes, Inspection, Image resolution, Objectives, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Modulation transfer functions, Spatial resolution, Zone plates

PROCEEDINGS ARTICLE | October 12, 2007
Proc. SPIE. 6702, Soft X-Ray Lasers and Applications VII
KEYWORDS: Microscopes, Capillaries, Image processing, Microscopy, Silicon, Objectives, Charge-coupled devices, Spatial resolution, X-ray lasers, Zone plates

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Light sources, Logic, Optical lithography, Lithographic illumination, Extreme ultraviolet, Cadmium sulfide, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Microscopes, Imaging systems, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Zone plates, Plasma

PROCEEDINGS ARTICLE | September 14, 2005
Proc. SPIE. 5919, Soft X-Ray Lasers and Applications VI
KEYWORDS: Microscopes, Modulation, Imaging systems, Capillaries, X-rays, Image resolution, Objectives, Spatial resolution, X-ray lasers, Zone plates

Showing 5 of 7 publications
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