Ms. Courtney A. Brewer Profile

Courtney A. Brewer

Process Development Engineer at Broadcom Inc

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Publications (7)

Proceedings Article | 29 September 2009 Paper

Advances in full field microscopy with table-top soft x-ray lasers

Carmen Menoni, Fernando Brizuela, Yong Wang, Courtney Brewer, Bradley Luther, Francesco Pedaci, Przemeslaw Wachulak, Mario Marconi, Jorge Rocca, Weilun Chao, Erik Anderson, Yanwei Liu, Kenneth Goldberg, David Attwood, Alexander Vinogradov, Igor Artyukov, Yuri Pershyn, Viktor Kondratenko

Proceedings Volume 7451, 74510I (2009) https://doi.org/10.1117/12.826419

KEYWORDS: Microscopes, Zone plates, Extreme ultraviolet lithography, Objectives, Photomasks, Spatial resolution, X-ray lasers, Microscopy, Modulation, Modulation transfer functions

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Proceedings Article | 18 March 2009 Paper

Inspection 13.2-nm table-top full-field microscope

F. Brizuela, Y. Wang, C. Brewer, F. Pedaci, W. Chao, E. Anderson, Y. Liu, K. Goldberg, P. Naulleau, P. Wachulak, M. Marconi, D. Attwood, J. Rocca, C. Menoni

Proceedings Volume 7271, 72713F (2009) https://doi.org/10.1117/12.814320

KEYWORDS: Microscopes, Spatial resolution, Extreme ultraviolet lithography, Zone plates, Photomasks, Extreme ultraviolet, Image resolution, Inspection, Objectives, Modulation transfer functions

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Proceedings Article | 12 October 2007 Paper

High spatial resolution full-field microscopy using a desktop-size soft x-ray laser

Courtney Brewer, Fernando Brizuela, Dale Martz, Georgiy Vaschenko, Mario Marconi, Weilun Chao, Erik Anderson, David Attwood, Alexander Vinogradov, Igor Artioukov, Yuriy Pershyn, Valeriy Kondratenko, Jorge Rocca, Carmen Menoni

Proceedings Volume 6702, 67020M (2007) https://doi.org/10.1117/12.733422

KEYWORDS: Microscopes, Zone plates, Spatial resolution, X-ray lasers, Microscopy, Image processing, Capillaries, Charge-coupled devices, Objectives, Silicon

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Proceedings Article | 24 March 2006 Paper

Process window study with various partial coherences on EUV MET (Micro Exposure Tool) optics

Sang Lee, Courtney Brewer, Manish Chandhok

Proceedings Volume 6151, 61512V (2006) https://doi.org/10.1117/12.657695

KEYWORDS: Extreme ultraviolet lithography, Lithography, Lithographic illumination, Extreme ultraviolet, Semiconducting wafers, EUV optics, Optical lithography, Light sources, Cadmium sulfide, Logic

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Proceedings Article | 23 March 2006 Paper

EUV imaging with a 13nm tabletop laser reaches sub-38 nm spatial resolution

Georgiy Vaschenko, Fernando Brizuela, Courtney Brewer, Miguel Larotonda, Yong Wang, Bradley Luther, Mario Marconi, Jorge Rocca, Carmen Menoni, Weilun Chao, Erik Anderson, Yanwei Liu, David Attwood

Proceedings Volume 6151, 61510X (2006) https://doi.org/10.1117/12.656588

KEYWORDS: Extreme ultraviolet, Zone plates, Spatial resolution, Microscopes, Photomasks, Imaging systems, Extreme ultraviolet lithography, Inspection, Plasma, Reflectivity

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Proceedings Article | 14 September 2005 Paper

Nanometer-scale imaging with compact soft x-ray lasers

Fernando Brizuela, Georgiy Vaschenko, Courtney Brewer, Michael Grisham, Carmen Menoni, Hector Mancini, Mario Marconi, Jorge Rocca, Weilun Chao, J. Alexander Liddle, Erik Anderson, David Attwood, Alexander Vinogradov, Igor Artioukov, Yuriy Pershyn, Valeriy Kondratenko

Proceedings Volume 5919, 59190N (2005) https://doi.org/10.1117/12.614646

KEYWORDS: Zone plates, Image resolution, X-ray lasers, Imaging systems, Capillaries, Microscopes, X-rays, Spatial resolution, Objectives, Modulation

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Proceedings Article | 10 May 2005 Paper

Nano-imaging with compact extreme ultraviolet laser sources

G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, Y. Wang, M. Larotonda, B. Luther, C. Menoni, M. Marconi, J. Rocca, W. Chao, J. Liddle, E. Anderson, D. Attwood, A. Vinogradov, I. Artioukov, Y. Pershyn, V. Kondratenko

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.601899

KEYWORDS: Zone plates, Extreme ultraviolet, Imaging systems, Image resolution, Microscopes, Laser sources, Silicon, Spatial resolution, Objectives, Reflectivity

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Showing 5 of 7 publications

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