Courtney A. Brewer
Process Development Engineer at Broadcom Inc
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 29 September 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: Microscopes, Modulation, Microscopy, Objectives, Photomasks, Extreme ultraviolet lithography, Modulation transfer functions, Spatial resolution, X-ray lasers, Zone plates

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Microscopes, Inspection, Image resolution, Objectives, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Modulation transfer functions, Spatial resolution, Zone plates

Proceedings Article | 12 October 2007
Proc. SPIE. 6702, Soft X-Ray Lasers and Applications VII
KEYWORDS: Microscopes, Capillaries, Image processing, Microscopy, Silicon, Objectives, Charge-coupled devices, Spatial resolution, X-ray lasers, Zone plates

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Light sources, Logic, Optical lithography, Lithographic illumination, Extreme ultraviolet, Cadmium sulfide, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Microscopes, Imaging systems, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Zone plates, Plasma

Showing 5 of 7 publications
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