Dr. Curtis Qiang Liang
Senior Marketing Manager at ASML Intl Trading Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 June 2006
Proc. SPIE. 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Reticles, Data modeling, Inspection, Data processing, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Model-based design, Process modeling

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Data modeling, Manufacturing, Data processing, Signal processing, Process control, Neural networks, Erbium, Performance modeling, Overlay metrology, Instrument modeling

Proceedings Article | 14 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Semiconductors, Oxides, Lithography, Optical lithography, Manufacturing, Resistance, Scanning electron microscopy, Photomasks, Optical proximity correction, Process modeling

Proceedings Article | 9 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Thin films, Data modeling, Manufacturing, Data processing, Photomasks, Optical proximity correction, Semiconducting wafers, Model-based design, Process modeling, Light wave propagation

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