Dr. Curtis L. Rettig
Senior Scientist at
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Optical amplifiers, Oscillators, High power lasers, Laser applications, Gas lasers, Extreme ultraviolet, Excimer lasers, Molybdenum, Neodymium lasers, Carbon monoxide

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Metrology, Lithium, Ions, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Prototyping, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Lithium, Ions, Diffusion, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Atomic, molecular, and optical physics, Opacity, Electrons, Ions, Ionization, Optical simulations, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Carbon, Light sources, Contamination, Electrodes, Magnetism, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Mirrors, Light sources, Metrology, Electrodes, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Zirconium, Plasma

Showing 5 of 6 publications
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