Cyril Bellegarde
at CEA-LETI
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 March 2019
Proc. SPIE. 10933, Advances in Photonics of Quantum Computing, Memory, and Communication XII
KEYWORDS: Waveguides, Annealing, Silicon, Hydrogen, Frequency combs, Photonics, Nonlinear optics, Silicon photonics, Line edge roughness, Absorption

Proceedings Article | 22 February 2018
Proc. SPIE. 10537, Silicon Photonics XIII
KEYWORDS: Optical lithography, Waveguides, Annealing, Interfaces, Silicon, Atomic force microscopy, Scanning electron microscopy, Wave propagation, Photomasks, Line edge roughness

Proceedings Article | 23 February 2017
Proc. SPIE. 10108, Silicon Photonics XII
KEYWORDS: Optical lithography, Silica, Waveguides, Scattering, Annealing, Silicon, Light scattering, 3D modeling, Optical testing, Photomasks, Photonic integrated circuits, Line edge roughness, Photoresist processing, Thermal oxidation, Plasma treatment, Plasma, Oxidation

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