Cyrille Laviron
at CEA-LETI
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | September 20, 2004
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Laser energy, Annealing, Silicon, Laser processing, Laser applications, Doping, Semiconductor lasers, Bridges, Photomasks, Boron

PROCEEDINGS ARTICLE | August 11, 1999
Proc. SPIE. 3883, Multilevel Interconnect Technology III
KEYWORDS: Oxides, Lithography, Metals, Dielectrics, Interfaces, Silicon, Reflectivity, Critical dimension metrology, Photoresist processing, Chemical mechanical planarization

PROCEEDINGS ARTICLE | July 26, 1999
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Oxides, Metals, Copper, Dielectrics, Interfaces, Silicon, Reflectivity, Critical dimension metrology, Photoresist processing, Chemical mechanical planarization

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top