Cyrille Laviron
at CEA-LETI
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 September 2004 Paper
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Laser energy, Annealing, Silicon, Laser processing, Laser applications, Doping, Semiconductor lasers, Bridges, Photomasks, Boron

Proceedings Article | 11 August 1999 Paper
Proc. SPIE. 3883, Multilevel Interconnect Technology III
KEYWORDS: Oxides, Lithography, Metals, Dielectrics, Interfaces, Silicon, Reflectivity, Critical dimension metrology, Photoresist processing, Chemical mechanical planarization

Proceedings Article | 26 July 1999 Paper
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Oxides, Metals, Copper, Dielectrics, Interfaces, Silicon, Reflectivity, Critical dimension metrology, Photoresist processing, Chemical mechanical planarization

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