Cyrus E. Tabery
Sr Principle Architect at ASML
SPIE Involvement:
Author
Publications (51)

SPIE Journal Paper | 30 January 2025
JM3, Vol. 24, Issue 01, 011012, (January 2025) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.011012
KEYWORDS: Optical proximity correction, Critical dimension metrology, Reflectivity, Extreme ultraviolet, Design, Light sources and illumination, Semiconducting wafers, Extreme ultraviolet lithography, Scanners, Reflection

SPIE Journal Paper | 17 December 2024
Parul Dhagat, Sofia Leitao, David Rio, Cyrus Tabery
JM3, Vol. 24, Issue 01, 011010, (December 2024) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.011010
KEYWORDS: SRAF, Printing, Nanoimprint lithography, Photovoltaics, Line edge roughness, Extreme ultraviolet, Source mask optimization, Electroluminescence, Lithography, Artificial intelligence

Proceedings Article | 21 November 2024 Presentation + Paper
Proceedings Volume 13215, 1321506 (2024) https://doi.org/10.1117/12.3035360
KEYWORDS: Photomasks, SRAF, Printing, Manufacturing, Standards development, Source mask optimization, Phase shifting, Lithography, Extreme ultraviolet lithography, Attenuation

Proceedings Article | 13 November 2024 Presentation
Natalia Davydova, Airat Galiullin, Cyrus Tabery, Bram Slachter, Adam Lyons, Jeremy Chen, Nick Pellens, Vincent Wiaux, Tatiana Kovalevich, Lieve van Look, Ataklti Weldeslassie, Joost Bekaert
Proceedings Volume PC13215, PC132150A (2024) https://doi.org/10.1117/12.3038962
KEYWORDS: Scanners, Semiconducting wafers, Scanning electron microscopy, Photomasks, Overlay metrology, Optical proximity correction, Metrology, Image processing, Extreme ultraviolet lithography, EUV optics

Proceedings Article | 26 August 2024 Paper
Proceedings Volume 13177, 131770F (2024) https://doi.org/10.1117/12.3034393
KEYWORDS: Reflectivity, Optical proximity correction, Critical dimension metrology, Reflection, Light sources and illumination, Semiconducting wafers, Tantalum, Design, 3D mask effects, Scanners

Showing 5 of 51 publications
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