Dr. D. Laurence Meixner
Director of R & D at Teledyne Scientific
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | 1 July 2004
JM3 Vol. 3 Issue 03
KEYWORDS: Silica, Pellicles, Aluminum, Sol-gels, Adsorption, Lithography, Nitrogen, Deep ultraviolet, Photomasks, Bioalcohols

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Glasses, Fluorine, Sol-gels, Photomasks, Silica, Chlorine, Birefringence, Lithography, Ultraviolet radiation, Oxidation

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Silica, Pellicles, Photomasks, Adsorption, Sol-gels, Aluminum, Bioalcohols, Nitrogen, Contamination control, Quartz

SPIE Journal Paper | 1 July 2003
JM3 Vol. 2 Issue 03
KEYWORDS: Sol-gels, Photomasks, Glasses, Silica, Deep ultraviolet, Birefringence, Manufacturing, Lithography, Polishing, Ultraviolet radiation

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Sol-gels, Photomasks, Glasses, Silica, Fluorine, Deep ultraviolet, Birefringence, Optical lithography, Polishing, Manufacturing

Showing 5 of 8 publications
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