Dr. David I. Pearson
Ion Beam Specialist at Oxford Instruments Plasma Technology Ltd
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 29 March 2021 Presentation + Paper
Proc. SPIE. 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II
KEYWORDS: Nanostructures, Refractive index, Waveguides, Etching, Polymers, Glasses, Augmented reality, Nanoimprint lithography, Optics manufacturing, Photorefractive polymers

Proceedings Article | 19 September 2016 Paper
Proc. SPIE. 9974, Infrared Sensors, Devices, and Applications VI
KEYWORDS: Oxides, Vanadium, Thin films, Sputter deposition, Resistance, Oxygen, Ion beams, Thin film deposition, Semiconducting wafers, Oxidation

Proceedings Article | 26 September 2013 Paper
Proc. SPIE. 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X
KEYWORDS: Thin films, Contamination, Silica, Etching, Argon, Sputter deposition, Metals, Ions, Xenon, Ion beams

Proceedings Article | 9 July 2003 Paper
Proc. SPIE. 4998, Photonic Integrated Systems
KEYWORDS: Optical filters, Calibration, Sputter deposition, Coating, Ion beams, Dense wavelength division multiplexing, Electronic filtering, Laser optics, Optics manufacturing, Absorption

Proceedings Article | 16 April 1993 Paper
Proc. SPIE. 1803, Advanced Techniques for Integrated Circuit Processing II
KEYWORDS: Oxides, Etching, Metals, Ions, Photoresist materials, Plasma etching, Chlorine, Semiconducting wafers, Anisotropic etching, Plasma

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