Mr. Da Song
Graduate Research Assistant at SUNY/Univ at Albany
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Thin films, Light sources, X-ray optics, Metrology, 3D acquisition, Metals, Germanium, Dielectrics, Silicon, Lamps, Control systems, 3D metrology, Process control, Transistors, Semiconducting wafers, Tolerancing

SPIE Journal Paper | April 1, 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Diffractive optical elements, Silicon, Actuators, Mirrors, Multilayers, Optical components, Scanning electron microscopy, Diffraction, Microopto electromechanical systems, Electrochemical etching

PROCEEDINGS ARTICLE | February 9, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Actuators, Optical components, Optical filters, Refractive index, Etching, Silicon, Reflectivity, Microopto electromechanical systems, Semiconducting wafers, Electrochemical etching

PROCEEDINGS ARTICLE | February 9, 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Microelectromechanical systems, Optical components, Optical filters, Beam steering, Sensors, Silicon, Reflectivity, Microopto electromechanical systems, Prototyping, Electrochemical etching

PROCEEDINGS ARTICLE | February 6, 2007
Proc. SPIE. 6480, Photonic Crystal Materials and Devices VI
KEYWORDS: Optical components, Diffraction, Refractive index, Optical properties, Etching, Silicon, Photonic crystals, Photoresist materials, Photomasks, Silicon photonics

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