Dr. Da Yang
at Cornell Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Electron beam lithography, Polymers, Glasses, Molecules, Silicon, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Chemical elements

PROCEEDINGS ARTICLE | January 19, 2005
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Lithography, Electron beam lithography, Etching, X-rays, Electrons, Resistance, Extreme ultraviolet lithography, X-ray lithography, Ion beam lithography, Absorption

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