Dr. Da Yang
at Cornell Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Electron beam lithography, Polymers, Glasses, Molecules, Silicon, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Chemical elements

Proceedings Article | 19 January 2005
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Lithography, Electron beam lithography, Etching, X-rays, Electrons, Resistance, Extreme ultraviolet lithography, X-ray lithography, Ion beam lithography, Absorption

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top