Dachen Chu
at Stanford Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 July 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Mathematical modeling, Electron beams, Quartz, Interfaces, Diffusion, Chromium, Distortion, Mask making, Thermal modeling, Edge roughness

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