Dr. Dae-Geun Choi
at Korea Institute of Machinery & Materials
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 September 2008
Proc. SPIE. 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V
KEYWORDS: Refractive index, Antireflective coatings, Optical lithography, Reflection, Polymers, Nickel, Photonic crystals, Transmittance, Nanoimprint lithography, Fluorine

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Finite-difference time-domain method, Optical lithography, Organic light emitting diodes, Polymers, Glasses, Ultraviolet radiation, Photonic crystals, Plasma enhanced chemical vapor deposition, Sol-gels, Zinc oxide

Proceedings Article | 15 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Thin films, Lithography, Etching, Quartz, Polymers, Glasses, Ultraviolet radiation, Liquid crystals, Transistors, Nanoimprint lithography

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Quartz, Polymers, Ultraviolet radiation, Coating, Transmittance, Plasma etching, Fluorine

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