Dr. Dae Sik Lee
Senior Researcher at ETRI
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | February 6, 2014
JBO Vol. 19 Issue 05
KEYWORDS: Silicon, Etching, Polymers, Reactive ion etching, Scanning electron microscopy, Anisotropic etching, Nanostructures, Nanolithography, Electron beam lithography, Electron beams

PROCEEDINGS ARTICLE | May 20, 2013
Proc. SPIE. 8879, Nano-Bio Sensing, Imaging, and Spectroscopy
KEYWORDS: Nanostructures, Blood, Etching, Ions, Silicon, Scanning electron microscopy, Semiconducting wafers, Nanofabrication, Nanolithography, Plasma

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Microfluidics, Sensors, Coating, Resistance, Control systems, System integration, Adhesives, Positron emission tomography, Liquids, Protactinium

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Semiconductors, Gold, Thin films, Microfluidics, Optical lithography, Polymers, Metals, Resistance, Semiconducting wafers, Polymer thin films

PROCEEDINGS ARTICLE | February 16, 2005
Proc. SPIE. 5651, Biomedical Applications of Micro- and Nanoengineering II
KEYWORDS: Neck, Microfluidics, Polymethylmethacrylate, Polymers, Capillaries, Nickel, Numerical simulations, Lab on a chip, Positron emission tomography, Liquids

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