Dr. Dagang Guo
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Mirrors, Fabry–Perot interferometers, Optical sensing, Sensors, Silicon, Reflectivity, Finite element methods, Tolerancing, Optical microcavities, Temperature metrology

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Fabrication, Thermography, Refractive index, Mirrors, Fabry–Perot interferometers, Sensors, Silicon, Reflectivity, Optical microcavities, Temperature metrology

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