Daijoon Hyun
at KAIST
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Clocks, Etching, Metals, Copper, Resistance, Signal processing, Photomasks, Double patterning technology, Chemical mechanical planarization

Proceedings Article | 28 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Electronics, Etching, Metals, Copper, Dielectrics, Chemical vapor deposition, Capacitance, Atomic layer deposition, Electrical engineering

Proceedings Article | 16 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Electronics, Metals, Dielectrics, Manufacturing, Monte Carlo methods, Capacitance, Photomasks, Double patterning technology, Electrical engineering, Design for manufacturability

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