Daisaku Mochida
at Nikon Tsubasa Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 24 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Data modeling, Polarization, Birefringence, Inspection, Polarizers, Scanning electron microscopy, Objectives, Critical dimension metrology, Semiconducting wafers, Edge roughness

Proceedings Article | 29 June 2006
Proc. SPIE. 6269, Ground-based and Airborne Instrumentation for Astronomy
KEYWORDS: Monochromatic aberrations, Telescopes, Mirrors, Spectrographs, Astronomy, Stars, Imaging systems, Electroluminescence, CCD cameras, Astronomical imaging

Proceedings Article | 30 September 2004
Proc. SPIE. 5492, Ground-based Instrumentation for Astronomy
KEYWORDS: Telescopes, Spectrographs, Imaging systems, Cameras, Sensors, Computing systems, Control systems, Infrared radiation, Astronomical imaging, Control systems design

Proceedings Article | 7 March 2003
Proc. SPIE. 4841, Instrument Design and Performance for Optical/Infrared Ground-based Telescopes
KEYWORDS: Telescopes, Mirrors, Spectrographs, Silica, Imaging systems, Cameras, Spectral resolution, Connectors, Astronomical imaging, Spine

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