A new technology was developed to detect Critical Dimension (CD) variations in a Fourier space. The detection
principle is a form birefringence of the wafer. Utilizing this principle, CD and Pattern Edge Roughness (PER) variations
are detected as a polarization fluctuation and converted into light intensity. We have achieved high resolution and high
sensitivity by combining a form birefringence with a novel optical system. This system detects the light intensity in a
Fourier space with a high NA objective, enabling the detection of various lights with different incident angles and
polarization states at a time. We have confirmed through simulations that this system has high sensitivity toward CD
variations. Furthermore, in partnership with Toshiba Corporation, and through the evaluation of wafers fabricated at
Toshiba, we conclude that the light intensity detected by the new system strongly correlates with CD values, and that the
new system is capable of detecting CD variations in sufficient sensitivity.
Fibre Multi-Object Spectrograph (FMOS) is one of the second-generation instruments of Subaru Telescope. FMOS is consisted of a number of subsystems; the Prime focus unit for IR (called PIR), the fibre positioning system/connector units, and the two spectrographs. The PIR and one spectrograph were made in Kyoto University, and were brought to the Subaru telescope last spring. The PIR attached to the telescope and stellar images were obtained for optical alignment in July and October last year. We report on these engineering run in this proceeding.
The Fibre Multi-Object Spectrograph (FMOS) for the primary focus
of Subaru Telescope is one of the second generation
instruments, aiming at acquiring spectra of faint objects with
target multiplicity of up to 400. The optimised wavelengths span
from 0.9 to 1.8 microns so as to extend our knowledge of galaxy
formations and evolutions at higher redshifts in a systematic way,
as well as of variety of intriguing near-infrared objects.
On the basis of detailed design of FMOS, actual processes of
fabrication are in progress, and some of critical hardware
components have successfully been developed. In this report,
we present the status of the FMOS project, the results of
developed components, and also instrument control systems such
as the new detector electronics as well the related contol
The Fibre Multi-Object Spectrograph (FMOS) is a second-generation common-use instrument of the Subaru telescope. Under an international collaboration scheme of Japan, UK, and Australia, a realistic design of FMOS has been already in completion, and the fabrications of hardware components have been in progress. We present the overall design details together with the special features of FMOS subsystems, such as the prime focus corrector, the prime focus mechanical unit including fiber positioners, and the near-infrared spectrograph, etc.