Dr. Daisuke Bizen
at Hitachi High-Technologies Corp.
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Cadmium, Silicon, Laser scattering, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Optical simulations, Spatial resolution, Critical dimension metrology

SPIE Journal Paper | June 29, 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Virtual colonoscopy, Scanning electron microscopy, Semiconducting wafers, Metrology, Image filtering

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Metrology, Logic, Electrons, Silicon, Scanning electron microscopy, 3D metrology, Process control, Image filtering, Logic devices, Critical dimension metrology, Selenium, Semiconducting wafers

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Amorphous silicon, Silica, Etching, Argon, Electrons, Silicon, Scanning electron microscopy, Monte Carlo methods, Selenium, Autoregressive models

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