Dr. Daisuke Nakamura Profile

Dr. Daisuke Nakamura

at Kyushu Univ

SPIE Involvement:

Author

Publications (50)

Proceedings Article | 10 April 2024 Presentation

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Toita Tomita, Masaharu Shiratani, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Atsushi Sunahara

Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018

KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

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Proceedings Article | 13 March 2024 Presentation

Effect of ring-shaped beam on microparticle fabrication and laser welding

Daisuke Nakamura, Kazutaka Horinouchi, Masahiro Koba, Ippei Watanabe, Toshifumi Kikuchi, Keita Katayama, Mitsuhiro Higashihata, Hiroshi Ikenoue

Proceedings Volume PC12872, PC128720I (2024) https://doi.org/10.1117/12.3009651

KEYWORDS: Laser welding, Fabrication, Laser ablation, Semiconductors, Semiconductor lasers, Ring lasers, Pulsed laser operation, Particles, Metals, Laser processing

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Proceedings Article | 12 March 2024 Presentation + Paper

Joint quality assessment by machine learning using characterized surface thermal radiation images of laser welding process

T. Kikuchi, R. Takabatake, K. Katayama, H. Ikenoue, D. Nakamura

Proceedings Volume 12878, 128780E (2024) https://doi.org/10.1117/12.3000891

KEYWORDS: Machine learning, Laser welding, Imaging spectroscopy, Spectroscopy, Laser radiation, Laser processing, Laser irradiation, Image processing

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Proceedings Article | 12 March 2024 Presentation + Paper

Influence of flow rate and gas type with a novel nozzle capable of simultaneously gas flow and suction on weld quality in laser welding

M. Koba, T. Kikuchi, D. Nakamura, H. Ikenoue

Proceedings Volume 12878, 128780F (2024) https://doi.org/10.1117/12.3001226

KEYWORDS: Nozzles, Laser irradiation, Copper, Laser welding, Blue lasers, Oxygen, Lasers, Infrared lasers, Light absorption, Laser scanners

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Proceedings Article | 17 March 2023 Poster + Paper

Nanosecond time-resolved two-dimensional temperature estimation of nanosecond laser-irradiated silicon

R. Koike, T. Kikuchi, K. Katayama, Y. Kakimoto, D. Nakamura, H. Ikenoue

Proceedings Volume 12408, 124080J (2023) https://doi.org/10.1117/12.2648631

KEYWORDS: Laser irradiation, Temperature metrology, Silicon, Pulsed laser operation, Temperature distribution, Laser processing, Laser radiation, Excimer lasers, Cameras, Solids

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Proceedings Article | 17 March 2023 Poster + Paper

Excimer laser doping for the fabrication of 4H-SiC power devices

Yoshiaki Kakimoto, Keita Katayama, Takuma Yasunami, Tetsuya Goto, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 12408, 124080M (2023) https://doi.org/10.1117/12.2651419

KEYWORDS: Silicon carbide, Laser irradiation, Doping, Resistance, Nitrogen, Excimer lasers, Diffusion, Surface roughness, Fabrication, Silicon

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Proceedings Article | 20 April 2021 Poster + Presentation + Paper

Fabrication of nanoparticles of oxide materials by UV pulsed laser ablation in gas phase

Rio Suzuki, Reiji Koike, Keita Katayama, Mitsuhiro Higashihata, Hiroshi Ikenoue, Daisuke Nakamura

Proceedings Volume 11674, 116741G (2021) https://doi.org/10.1117/12.2576843

KEYWORDS: Nanoparticles, Laser ablation, Ultraviolet radiation, Oxides, Nanolithography, Gas lasers, Zinc oxide, Optoelectronics, Nanocrystals, Visualization

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Proceedings Article | 10 March 2021 Presentation + Paper

Formation of twisted Au microstructures by optical vortex pulse irradiation

Tsubasa Fujimoto, Miki Kawamoto, Mitsuhiro Higashihata, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 11674, 1167410 (2021) https://doi.org/10.1117/12.2577106

KEYWORDS: Optical vortices, Gold, Thin films, Pulsed laser operation, Optical simulations, Laser optics

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Proceedings Article | 5 March 2021 Presentation + Paper

Estimation of the mobility of low temperature polycrystalline silicon thin film transistors through deep learning

Akira Mizutani, Fuminobu Hamano, Keita Katayama, Daisuke Nakamura, Tetsuya Goto, Hiroshi Ikenoue

Proceedings Volume 11673, 1167306 (2021) https://doi.org/10.1117/12.2579492

KEYWORDS: Transistors, Silicon films, Annealing, Silicon, Optical microscopes, Image quality, Excimer lasers, Crystals, Amorphous silicon, Thin films

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Proceedings Article | 22 January 2020 Presentation + Paper

Surface flattening of poly-Si thin films by laser annealing and electrical properties of LTPS-TFTs

Fuminobu Hamano, Akira Mizutani, Kaname Imokawa, Daisuke Nakamura, Tetsuya Goto, Hiroshi Ikenoue

Proceedings Volume 11268, 1126810 (2020) https://doi.org/10.1117/12.2544910

KEYWORDS: Thin films, Annealing, Excimer lasers, Crystals, Laser irradiation, Radium, Thin film devices, Transistors, Switching, Flat panel displays

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Proceedings Article | 13 March 2019 Presentation

Fabrication of multicomponent semiconductor microspheres by laser ablation in air (Conference Presentation)

Daisuke Nakamura, Yuichiro Wakiyama, Hiroki Oshima, Mitsuhiro Higashihata, Hiroshi Ikenoue, Nilesh Vasa, M. S. Ramachandra Rao

Proceedings Volume 10905, 1090510 (2019) https://doi.org/10.1117/12.2510985

KEYWORDS: Semiconductors, Laser ablation, Semiconductor lasers, Fabrication, Crystals, Spherical lenses, Laser crystals, Zinc oxide, Silicon, Liquid crystals

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Proceedings Article | 4 March 2019 Presentation + Paper

Low-temperature and low-cost excimer laser doping for poly-Si thin-film transistor fabrication

Kaname Imokawa, Nozomu Tanaka, Akira Suwa, Daisuke Nakamura, Taizoh Sadoh, Tetsuya Goto, Hiroshi Ikenoue

Proceedings Volume 10906, 109060J (2019) https://doi.org/10.1117/12.2509141

KEYWORDS: Silicon, Doping, Excimer lasers, Transistors, Phosphorus, Amorphous silicon, Thin films, Pulsed laser operation, Electrodes, Coating

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Proceedings Article | 4 March 2019 Presentation + Paper

Synthesis of GeSn particles with high substitutional Sn concentration by pulsed laser deposition

Teppei Nakashima, Toshifumi Kikuchi, Kaname Imokawa, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 10907, 109070P (2019) https://doi.org/10.1117/12.2509179

KEYWORDS: Particles, Tin, Raman spectroscopy, Spherical lenses, Argon, Crystals, Germanium, Chemical species, Silicon, Protactinium

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Proceedings Article | 4 March 2019 Presentation + Paper

Low-temperature, high-concentration laser doping of 4H-SiC for low contact resistance

T. Kikuchi, K. Imokawa, A. Ikeda, D. Nakamura, T. Asano, H. Ikenoue

Proceedings Volume 10905, 109050Z (2019) https://doi.org/10.1117/12.2509191

KEYWORDS: Silicon carbide, Doping, Resistance, Electrodes, Crystals, Laser irradiation, Argon, Excimer lasers, Oxidation, Nitrogen

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Proceedings Article | 4 March 2019 Presentation + Paper

Formation of nanoporous SiO2 films with super-low dielectric constant by F2 laser deposition

Ryota Miyano, Toshifumi Kikuchi, Kaname Imokawa, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 10907, 109070S (2019) https://doi.org/10.1117/12.2509176

KEYWORDS: Protactinium, Argon, Nanoparticles, Dielectrics, Quartz, Molecules, Silica, Laser ablation, Atomic force microscopy, Resistance

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Proceedings Article | 14 March 2018 Presentation

Simple fabrication of semiconductor microspheres by laser ablation in air (Conference Presentation)

Daisuke Nakamura, Ryohei Tasaki, Yuichiro Wakiyama, Sho Kawagoe, Hiroki Oshima, Mitsuhiro Hiashihata, Nilesh Vasa, Hiroshi Ikenoue

Proceedings Volume 10519, 1051914 (2018) https://doi.org/10.1117/12.2291401

KEYWORDS: Laser ablation, Zinc oxide, Semiconductor lasers, Semiconductors, Optical vortices, Crystals, Laser crystals, Silicon, Laser processing, Beam shaping

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Proceedings Article | 21 April 2017 Presentation

High-speed observation of ZnO microspherical crystals produced by laser ablation (Conference Presentation)

Daisuke Nakamura, Ryohei Tasaki, Yuki Fujiwara, Fumiaki Nagasaki, Mitsuhiro Higashihata, Hiroshi Ikenoue, Tatsuo Okada

Proceedings Volume 10091, 100910E (2017) https://doi.org/10.1117/12.2253468

KEYWORDS: Laser applications, Zinc oxide, Crystals, Laser ablation, Laser crystals, Optoelectronic devices, Ultraviolet radiation, Optical spheres, Spherical lenses, High speed cameras

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Proceedings Article | 20 February 2017 Paper

Optical and magnetic characterization of transition metal ion doped ZnO microspheres synthesized via laser ablation in air

Parvathy Anitha Sukkurji, Yuki Fujiwara, Nilesh Jayantilal Vasa, M. S. Ramachandra Rao, Mitsuhiro Higashihata, Daisuke Nakamura

Proceedings Volume 10090, 100901X (2017) https://doi.org/10.1117/12.2253560

KEYWORDS: Zinc oxide, Luminescence, Transition metals, Semiconductors, Ions, Magnetic semiconductors, Crystals, Magnetism, Laser ablation, P-type semiconductors, Scanning electron microscopy, Manganese, Raman spectroscopy, YAG lasers, Ultraviolet radiation, Spherical lenses

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Proceedings Article | 20 February 2017 Presentation + Paper

Damage free Al doping on 4H-SiC with passivation films using XeF excimer laser irradiation in AlCl3 acid solution

T. Tsuchiya, A. Suwa, A. Ikeda, D. Nakamura, T. Asano, H. Ikenoue

Proceedings Volume 10091, 1009106 (2017) https://doi.org/10.1117/12.2250712

KEYWORDS: Silicon carbide, Doping, Aluminum, Excimer lasers, Laser irradiation, Luminescence, Silicon, Physical vapor deposition, Wet etching, Plasma treatment, Electroluminescence, Laser ablation, Diodes

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Proceedings Article | 6 April 2016 Paper

Improvement in contact resistance of 4H-SiC by excimer laser doping using silicon nitride films

R. Kojima, H. Ikenoue, M. Suwa, A. Ikeda, D. Nakamura, T. Asano, T. Okada

Proceedings Volume 9738, 973803 (2016) https://doi.org/10.1117/12.2212021

KEYWORDS: Silicon carbide, Doping, Excimer lasers, Laser ablation, Resistance, Nitrogen, Laser irradiation

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Proceedings Article | 14 March 2016 Paper

Fabrication and bandgap engineering of doped ZnO microspheres by simple laser ablation in air

Daisuke Nakamura, Tetsuya Shimogaki, Toshinobu Tanaka, Fumiaki Nagasaki, Yuki Fujiwara, Mitsuhiro Higashihata, Hiroshi Ikenoue, Tatsuo Okada

Proceedings Volume 9735, 973511 (2016) https://doi.org/10.1117/12.2214054

KEYWORDS: Zinc oxide, Ultraviolet radiation, Laser ablation, Doping, Crystals, Ultraviolet light emitting diodes, Semiconductor lasers, Buildings, Magnesium, Nd:YAG lasers, Micro raman spectroscopy, Spectroscopy, Laser crystals

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Proceedings Article | 14 March 2016 Paper

Observation of graphene growing process on SiC(0001) surface formed by KrF excimer-laser irradiation

Masakazu Hattori, Hiroshi Ikenoue, Daisuke Nakamura, Tatsuo Okada

Proceedings Volume 9735, 97350Y (2016) https://doi.org/10.1117/12.2211865

KEYWORDS: Graphene, Silicon carbide, Excimer lasers, Laser irradiation, Carbon, Laser processing, Atomic force microscopy, Transmission electron microscopy, Pulsed laser operation, Silicon, Optical lithography, Raman spectroscopy, Signal detection, Lithography

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Proceedings Article | 27 February 2016 Paper

Optical and structural properties of P-doped ZnO microsphere synthesized by pulsed laser ablation

Y. Fujiwara, T. Ikebuchi, T. Ueyama, T. Tanaka, F. Nagasaki, M. Higashihata, D. Nakamura, T. Okada

Proceedings Volume 9749, 97490T (2016) https://doi.org/10.1117/12.2212157

KEYWORDS: Zinc oxide, Laser ablation, Ultraviolet radiation, Crystals, Doping, Excitons, Gallium nitride, Ultraviolet light emitting diodes, Semiconductor lasers, Laser crystals, Phosphorus, Nd:YAG lasers, Silicon, Raman spectroscopy, Luminescence

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Proceedings Article | 13 March 2015 Paper

Fabrication of ZnO crystals by UV-laser annealing on ZnO nanoparticles prepared by laser ablation method

T. Shimogaki, H. Kawahara, M. Higashihata, H. Ikenoue, D. Nakamura, Y. Nakata, T. Okada

Proceedings Volume 9364, 93640C (2015) https://doi.org/10.1117/12.2078849

KEYWORDS: Zinc oxide, Nanoparticles, Crystals, Annealing, Laser crystals, Nanocrystals, Ultraviolet radiation, Scanning electron microscopy, Laser ablation, Nanowires

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Proceedings Article | 4 March 2015 Paper

Synthesis of Sb-doped ZnO microspheres by pulsed laser ablation and their photoluminescence properties

T. Tanaka, T. Shimogaki, F. Nagasaki, M. Higashihata, D. Nakamura, H. Ikenoue, T. Okada

Proceedings Volume 9350, 93501L (2015) https://doi.org/10.1117/12.2180460

KEYWORDS: Zinc oxide, Antimony, Ultraviolet radiation, Laser ablation, Nd:YAG lasers, Crystals, Zinc, Raman spectroscopy, Luminescence, Scanning electron microscopy

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Proceedings Article | 4 March 2015 Paper

Dynamics of ZnO nanoparticles formed in the high-pressure phase during growth of ZnO nanocrystals

D. Nakamura, T. Shimogaki, S. Takao, S. Nakao, K. Harada, M. Higashihata, T. Okada

Proceedings Volume 9350, 93500X (2015) https://doi.org/10.1117/12.2080503

KEYWORDS: Zinc oxide, Nanoparticles, Laser ablation, Clouds, Nanocrystals, Light scattering, Laser scattering, Argon, Scattering, Silicon carbide

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Proceedings Article | 8 March 2014 Paper

Electroluminescence from ZnO nanowire-based heterojunction LED

D. Nakamura, N. Tetsuyama, T. Shimogaki, M. Higashihata, H. Ikenoue, T. Okada

Proceedings Volume 8987, 89870H (2014) https://doi.org/10.1117/12.2039705

KEYWORDS: Zinc oxide, Heterojunctions, Light emitting diodes, Gallium nitride, Laser irradiation, Electroluminescence, Ultraviolet radiation, Pulsed laser deposition, Visible radiation, Nanowires

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Proceedings Article | 8 March 2014 Paper

Emission characteristics of electrically- and optically-pumped single ZnO micro-spherical crystal

D. Nakamura, T. Shimogaki, N. Tetsuyama, K. Fusazaki, Y. Mizokami, M. Higashihata, H. Ikenoue, T. Okada

Proceedings Volume 8987, 89870B (2014) https://doi.org/10.1117/12.2038922

KEYWORDS: Zinc oxide, Ultraviolet radiation, Heterojunctions, Electroluminescence, Optical spheres, Crystals, Nd:YAG lasers, Laser ablation, Singular optics, Refractive index

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Proceedings Article | 8 March 2014 Paper

Control of optical and electrical properties of ZnO nanocrystals by nanosecond-laser annealing

T. Shimogaki, T. Ofuji, N. Tetsuyama, H. Kawahara, M. Higashihata, H. Ikenoue, D. Nakamura, T. Okada

Proceedings Volume 8987, 89870G (2014) https://doi.org/10.1117/12.2039184

KEYWORDS: Zinc oxide, Annealing, Thin films, Nanocrystals, Crystals, Excimer lasers, Scanning electron microscopy, Antimony, Nanowires, Nanorods

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Proceedings Article | 6 March 2014 Paper

Shape-controlled ZnO nanocrystals using multi-beam interference irradiation

D. Nakamura, T. Shimogaki, Y. Muraoka, S. Nakao, K. Harada, M. Higashihata, Y. Nakata, T. Okada

Proceedings Volume 8967, 89671G (2014) https://doi.org/10.1117/12.2039732

KEYWORDS: Zinc oxide, Nanocrystals, Sapphire, Gallium nitride, Ultraviolet radiation, Scanning electron microscopy, Nanostructures, Optoelectronics, Electron beam lithography, Nanowires

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Proceedings Article | 6 March 2014 Paper

High quality ZnO film formation by CO2 laser annealing of buried films in SiO2 matrix

K. Yamasaki, H. Ikenoue, T. Shimogaki, Y. Watanabe, D. Nakamura, T. Okada

Proceedings Volume 8967, 89671E (2014) https://doi.org/10.1117/12.2038762

KEYWORDS: Zinc oxide, Annealing, Silica, Carbon dioxide lasers, Coating, Thin films, Crystals, Luminescence, Ultraviolet radiation, Laser crystals

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Proceedings Article | 9 May 2013 Paper

Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas

Tetsuya Makimura, Shuichi Torii, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

Proceedings Volume 8777, 877706 (2013) https://doi.org/10.1117/12.2019048

KEYWORDS: Extreme ultraviolet, Silica, Laser ablation, Plasmas, Polymethylmethacrylate, Glasses, Micromachining, Mirrors, Zirconium, Ions

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Proceedings Article | 18 March 2013 Paper

Lasing characteristics of optically-pumped single ZnO micro/nanocrystal

Kota Okazaki, Tetsuya Shimogaki, Koshi Fusazaki, Mitsuhiro Higashihata, Daisuke Nakamura, Naoto Koshizaki, Tatsuo Okada

Proceedings Volume 8626, 86260W (2013) https://doi.org/10.1117/12.2004424

KEYWORDS: Zinc oxide, Optical spheres, Ultraviolet radiation, Crystals, Scanning electron microscopy, Charge-coupled devices, Spherical lenses, Micro raman spectroscopy, Continuous wave operation, Silica

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Proceedings Article | 18 March 2013 Paper

Applications of nanosecond laser annealing to fabricating p-n homo junction on ZnO nanorods

T. Shimogaki, T. Ofuji, N. Tetsuyama, K. Okazaki, M. Higashihata, D. Nakamura, H. Ikenoue, T. Asano, T. Okada

Proceedings Volume 8626, 86260V (2013) https://doi.org/10.1117/12.2003856

KEYWORDS: Zinc oxide, Annealing, Ions, Crystals, Phosphorus, Zinc, Laser crystals, Excimer lasers, Scanning electron microscopy, Nanorods

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Proceedings Article | 13 March 2013 Paper

Growth of periodic ZnO nano-crystals on buffer layer patterned by interference laser irradiation

D. Nakamura, T. Shimogaki, K. Okazaki, M. Higashihata, Y. Nakata, T. Okada

Proceedings Volume 8607, 860703 (2013) https://doi.org/10.1117/12.2002961

KEYWORDS: Zinc oxide, Laser irradiation, Scanning electron microscopy, Ultraviolet radiation, Optoelectronics, Nanocrystals, Pulsed laser deposition, Sapphire, Nd:YAG lasers, Nanowires

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Proceedings Article | 16 February 2012 Paper

Influence of ZnO buffer layer on ZnO nanowire growth by nanoparticle-assisted pulsed laser deposition

D. Nakamura, T. Shimogaki, K. Okazaki, I. Palani, K. Kubo, K. Tsuta, M. Higashihata, T. Okada

Proceedings Volume 8245, 82450N (2012) https://doi.org/10.1117/12.907514

KEYWORDS: Zinc oxide, Scanning electron microscopy, Ultraviolet radiation, Pulsed laser deposition, Visible radiation, Nanostructures, Sapphire, Oxygen, Optical properties, Nanowires

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Proceedings Article | 19 May 2011 Paper

Micromachining of polydimethylsiloxane induced by laser plasma EUV light

S. Torii, T. Makimura, K. Okazaki, D. Nakamura, A. Takahashi, T. Okada, H. Niino, K. Murakami

Proceedings Volume 8077, 807714 (2011) https://doi.org/10.1117/12.887384

KEYWORDS: Extreme ultraviolet, Plasma, Micromachining, Laser ablation, Pulsed laser operation, Mirrors, Nd:YAG lasers, Zirconium, Optical filters, Microfluidics

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Proceedings Article | 19 May 2011 Paper

Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining

Tetsuya Makimura, Shuichi Torii, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Hiroyuki Niino, Tatsuo Okada, Kouichi Murakami

Proceedings Volume 8077, 80770F (2011) https://doi.org/10.1117/12.887615

KEYWORDS: Extreme ultraviolet, Polymethylmethacrylate, Plasma, Laser ablation, Zirconium, Micromachining, Optical filters, Tantalum, Nd:YAG lasers, Xenon

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Proceedings Article | 15 March 2011 Paper

Synthesis and characterization of layer structured ZnO nanowire for ultraviolet light-emitting diode

D. Nakamura, A. Kumeda, K. Toya, K. Okazaki, K. Kubo, K. Tsuta, M. Higashihata, T. Okada

Proceedings Volume 7940, 79400C (2011) https://doi.org/10.1117/12.876106

KEYWORDS: Zinc oxide, Scanning electron microscopy, Nanostructures, Ultraviolet light emitting diodes, Luminescence, Light emitting diodes, Sapphire, Oxygen, Ultraviolet radiation, Nanowires

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Proceedings Article | 28 February 2011 Paper

Synthesis and optical property of nanostructured ZnO crystals by nanoparticle-assisted pulsed laser deposition

D. Nakamura, T. Okada, K. Sakai

Proceedings Volume 7996, 79960E (2011) https://doi.org/10.1117/12.887240

KEYWORDS: Zinc oxide, Sapphire, Scanning electron microscopy, Crystals, Ultraviolet radiation, Heterojunctions, Phosphorus, Light emitting diodes, Nanostructures, Nanowires

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Proceedings Article | 22 February 2011 Paper

Lasing and laser-induced motion of zinc oxide nano-crystals irradiated by ultraviolet laser beam

K. Okazaki, D. Nakamura, M. Higashihata, T. Okada

Proceedings Volume 7922, 79220M (2011) https://doi.org/10.1117/12.875793

KEYWORDS: Zinc oxide, Nanocrystals, Ultraviolet radiation, Laser irradiation, Silicon, Chemical vapor deposition, Silica, Glasses, Optical microscopes, Nanowires

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Proceedings Article | 22 February 2011 Paper

Fabrication of layer structured ZnO nanowire by nanoparticle-assisted pulsed laser deposition for optoelectronic application

D. Nakamura, A. Kumeda, K. Toya, K. Okazaki, K. Kubo, K. Tsuta, M. Higashihata, T. Okada

Proceedings Volume 7922, 792203 (2011) https://doi.org/10.1117/12.874607

KEYWORDS: Zinc oxide, Scanning electron microscopy, Optoelectronics, Nanostructures, Pulsed laser deposition, Sapphire, Oxygen, Optoelectronic devices, Ultraviolet radiation, Nanowires

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Proceedings Article | 3 March 2010 Paper

Oxygen saturation imaging of human retinal vessels and measurement in eye disease patient for clinical application

D. Nakamura, N. Matsuoka, K. Tatsuguchi, M. Ogata, Y. Yoshinaga, H. Enaida, T. Okada, T. Ishibashi

Proceedings Volume 7550, 75501X (2010) https://doi.org/10.1117/12.841434

KEYWORDS: Oxygen, Image filtering, Optical filters, Retinal scanning, Data processing, Eye, Spectroscopy, Image processing, Capillaries, CCD cameras

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Proceedings Article | 26 February 2010 Paper

Synthesis and characterization of ZnO nanocrystals by nanoparticle-assisted pulsed laser deposition

D. Nakamura, T. Matsumoto, A. Kumeda, K. Toya, K. Okazaki, M. Higashihata, B. Q. Cao, T. Okada

Proceedings Volume 7586, 75860B (2010) https://doi.org/10.1117/12.841469

KEYWORDS: Zinc oxide, Heterojunctions, Nanostructures, Sapphire, Scanning electron microscopy, Oxygen, Optoelectronics, Argon, Nanowires, Nanorods

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Proceedings Article | 24 February 2009 Paper

Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source

K. Okazaki, D. Nakamura, T. Akiyama, K. Toya, A. Takahashi, T. Okada

Proceedings Volume 7201, 72010T (2009) https://doi.org/10.1117/12.807525

KEYWORDS: Tin, Carbon dioxide lasers, Clouds, Chemical species, Nd:YAG lasers, Plasma, Extreme ultraviolet, Ions, Extreme ultraviolet lithography, Light sources

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Proceedings Article | 18 February 2009 Paper

Automated spectroscopic imaging of oxygen saturation in human retinal vessels

D. Nakamura, S. Sueda, N. Matsuoka, Y. Yoshinaga, H. Enaida, T. Okada, T. Ishibashi

Proceedings Volume 7163, 71631N (2009) https://doi.org/10.1117/12.807537

KEYWORDS: Oxygen, Arteries, Spectroscopy, Image processing, Veins, Image filtering, Imaging spectroscopy, Beam splitters, Ear, Visualization

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Proceedings Article | 15 February 2008 Paper

Controlled growth of ZnO nanowires by nanoparticle-assisted laser ablation deposition

T. Okada, R. Guo, J. Nishimura, M. Matsumoto, M. Higashihata, D. Nakamura

Proceedings Volume 6895, 68950S (2008) https://doi.org/10.1117/12.760922

KEYWORDS: Zinc oxide, Nanoparticles, Sapphire, Laser ablation, Scanning electron microscopy, Laser energy, Electrodes, Argon, Ultraviolet radiation, Nanowires

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Proceedings Article | 14 February 2008 Paper

Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada

Proceedings Volume 6879, 687909 (2008) https://doi.org/10.1117/12.767894

KEYWORDS: Carbon dioxide lasers, Tin, Plasmas, Neodymium, Ions, Nd:YAG lasers, YAG lasers, Carbon dioxide, Extreme ultraviolet, Light sources

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Proceedings Article | 13 March 2007 Paper

Laser-imaging diagnostics of debris behavior from laser-produced tin plasma for EUV light sources

D. Nakamura, H. Tanaka, Y. Hashimoto, K. Tamaru, A. Takahashi, T. Okada

Proceedings Volume 6458, 645808 (2007) https://doi.org/10.1117/12.698790

KEYWORDS: Tin, Chemical species, Plasma, Laser induced fluorescence, Silicon, Extreme ultraviolet, Nd:YAG lasers, Ions, Luminescence, Light sources

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Proceedings Article | 1 March 2006 Paper

Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy

Dasisuke Nakamura, Takayuki Takao, Yuji Oki, Mitsuo Maeda

Proceedings Volume 6106, 61061A (2006) https://doi.org/10.1117/12.645323

KEYWORDS: Laser ablation, Chemical species, Laser induced fluorescence, Spectroscopy, Diffusion, Particles, Sodium, Fluorescence spectroscopy, Laser beam diagnostics, Excimer lasers

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