Dr. Dale E. Ewbank Profile

Dr. Dale E. Ewbank

Senior Lecturer at Rochester Institute of Technology

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Publications (2)

Proceedings Article | 30 July 2002 Paper

OPC and image optimization using localized frequency analysis

Bruce Smith, Dale Ewbank

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474509

KEYWORDS: Photomasks, Optical proximity correction, Diffraction, Model-based design, Lithography, Convolution, Image filtering, Printing, SRAF, Signal processing

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Proceedings Article | 8 December 1995 Paper

Evaluation of commercial and experimental resist materials for use in MEBES mask making

Charles Sauer, Robert Dean, Etsuya Morita, Zoilo Tan, Bruce Smith, Dale Ewbank, Sid Duttagupta, Anne Rudack

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228215

KEYWORDS: Etching, Polonium, Dry etching, Chemically amplified resists, Photoresist processing, Plasma etching, Plasma, Resistance, Niobium, Critical dimension metrology

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