Under the background of high precision machining requirements for planar optical elements, the overall structure design of four-axis special milling equipment was made, and the basic materials of equipment components were set. The precision distribution of the moving parts of the equipment is carried out for the traction of the plane optical element with high precision and high efficiency machining, so the equipment model is designed. The static simulation analysis was carried out in the two limit states of the equipment model, the basic design model and the optimal design model were compared. In the intermediate processing state, the deformation of the processing point and the driving part of the basic design model was optimized from 0.298 micron and 0.20 micron to 0.172 micron and 0.155 micron of the optimal design model respectively. The deformation of the processing point and the transmission part of the basic design model was optimized from 0.301 micron and 0.197 micron to 0.197 micron and 0.201 micron of the optimal design model, respectively.
Full aperture rapid planar polishing (RPP) equipment has been widely used in the field of optical processing, which requires high precision and stability of the polishing shaft. With high stability and sustainability of precision, the aerostatic bearing is the potential technology for RPP machine. To meet the needs of RPP machine, Fluent was used to analyze the load-bearing characteristics of high-precision aerostatic bearing. Based on the simulated results, the parameter optimization design for porous aerostatic bearing was conducted to get better load-bearing characteristics, including bearing capacity, static stiffness and gas consumption. The influence of air supply pressure, porous material thickness and film thickness on bearing characteristics were studied, and the simulation analysis was performed to get the optimal design parameters for aerostatic bearing. The simulated results show that the designed high-precision aerostatic bearing can satisfy the requirements of RPP machine.
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